Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness
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Landing PageLanding Page
References
https://doi.org/10.1063/1.2764372 |
https://doi.org/10.1088/0957-0233/17/10/041 |
https://doi.org/10.1088/0957-4484/23/37/375702 |
Dates
Metadata Created Date | September 30, 2025 |
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Metadata Updated Date | September 30, 2025 |
Data Update Frequency | irregular |
Metadata Source
- Data.json Data.json Metadata
Harvested from Commerce Non Spatial Data.json Harvest Source
Additional Metadata
Resource Type | Dataset |
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Metadata Created Date | September 30, 2025 |
Metadata Updated Date | September 30, 2025 |
Publisher | National Institute of Standards and Technology |
Maintainer | |
Identifier | ark:/88434/mds2-2450 |
Language | en |
Data Last Modified | 2021-08-26 00:00:00 |
Rights | Purchase is not required for data downloading. Users must complete registration form to download data. |
Category | Metrology:Acoustic/vibration metrology, Metrology:Force metrology, Nanotechnology:Nanofabrication/manufacturing, Nanotechnology:Nanomechanics |
Public Access Level | public |
Data Update Frequency | irregular |
Bureau Code | 006:55 |
Metadata Context | https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld |
Schema Version | https://project-open-data.cio.gov/v1.1/schema |
Catalog Describedby | https://project-open-data.cio.gov/v1.1/schema/catalog.json |
Harvest Object Id | 8e0f8950-904f-4c15-bade-1816b392371e |
Harvest Source Id | bce99b55-29c1-47be-b214-b8e71e9180b1 |
Harvest Source Title | Commerce Non Spatial Data.json Harvest Source |
Homepage URL | https://data.nist.gov/od/id/mds2-2450 |
License | https://www.nist.gov/open/license |
Program Code | 006:045 |
Related Documents | https://doi.org/10.1063/1.2764372, https://doi.org/10.1088/0957-0233/17/10/041, https://doi.org/10.1088/0957-4484/23/37/375702 |
Source Datajson Identifier | True |
Source Hash | db0cbca7ab3279a86f6fcafc428cd1b37a8f07e1926cd9bfd85e36a2d8b3deeb |
Source Schema Version | 1.1 |
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