MS Excel File
URL: https://data.nist.gov/od/ds/ark:/88434/mds2-2450/LDVData/W2_22_K_m01.xlsx
W2_22_K_m01.xlsx
Source: Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness
About this Resource
| Last updated | unknown | 
|---|---|
| Created | unknown | 
| Format | MS Excel File | 
| License | other-license-specified | 
| Created | 1 month ago | 
| Media type | application/vnd.openxmlformats-officedocument.spreadsheetml.sheet | 
| has views | False | 
| id | c01ee02c-dca7-4d38-a79d-8ff6c1a274cb | 
| metadata modified | 1 month ago | 
| package id | b45af1c8-7301-4fc5-bdb7-7af6c5870f9c | 
| position | 367 | 
| state | active | 
| tracking summary | {'total': 0, 'recent': 0} |