MS Excel File
URL: https://data.nist.gov/od/ds/ark:/88434/mds2-2450/LDVData/W2_22_D_m02.xlsx
W2_22_D_m02.xlsx
Source: Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness
About this Resource
| Last updated | unknown |
|---|---|
| Created | unknown |
| Format | MS Excel File |
| License | other-license-specified |
| Created | 1 month ago |
| Media type | application/vnd.openxmlformats-officedocument.spreadsheetml.sheet |
| has views | False |
| id | c25c3315-922e-4a65-af7a-68df7bfdab6f |
| metadata modified | 1 month ago |
| package id | b45af1c8-7301-4fc5-bdb7-7af6c5870f9c |
| position | 379 |
| state | active |
| tracking summary | {'total': 0, 'recent': 0} |