MS Excel File
URL: https://data.nist.gov/od/ds/ark:/88434/mds2-2450/LDVData/W2_38_I_m01.xlsx
W2_38_I_m01.xlsx
Source: Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness
About this Resource
| Last updated | unknown | 
|---|---|
| Created | unknown | 
| Format | MS Excel File | 
| License | other-license-specified | 
| Created | 1 month ago | 
| Media type | application/vnd.openxmlformats-officedocument.spreadsheetml.sheet | 
| has views | False | 
| id | 781949d7-379f-44ed-8e8e-07a14433d7b3 | 
| metadata modified | 1 month ago | 
| package id | b45af1c8-7301-4fc5-bdb7-7af6c5870f9c | 
| position | 188 | 
| state | active | 
| tracking summary | {'total': 0, 'recent': 0} | 
 
                