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    • Measuring the permittivity of Fused Silica with planar on-wafer structures up to 325 GHz

    Metadata Updated: September 30, 2025

    Fused silica has become an interesting alternative to silicon for millimeter-wave (mmWave) applications. Unfortunately, there are few reports on the measurement of fused silica’s permittivity above 110 GHz that use electrical rather than optical methods. Given that mmWave applications use electrical circuits, additional electrical data would be useful to industry. To test the feasibility of electrical methods, we applied on-wafer techniques based on coplanar waveguide transmission lines to measure the complex permittivity of fused silica to 325 GHz. Our approach used the multiline thru reflect line algorithm on the scattering parameter measurements of transmission lines. Our method combined these results with dc measurements of the resistivity of the metals, simulations of the coplanar waveguide cross section, and dimensional metrology. The resulting complex permittivity was epsilon_r = 3.87±0.03 and a loss tangent tan_delta < 0.005 from 320 MHz to 325 GHz. To support our conclusions, we performed an uncertainty analysis considering relevant sources of uncertainty. In the broader context, these results show that fused silica is a suitable substrate for mmWave electronics where the loss tangent must be less than 0.005 up to 325 GHz.

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    Public: This dataset is intended for public access and use. License: See this page for license information.

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    Dates

    Metadata Created Date September 30, 2025
    Metadata Updated Date September 30, 2025
    Data Update Frequency irregular

    Metadata Source

    Harvested from Commerce Non Spatial Data.json Harvest Source

    Other Data Resources

    Additional Metadata

    Resource Type Dataset
    Metadata Created Date September 30, 2025
    Metadata Updated Date September 30, 2025
    Publisher National Institute of Standards and Technology
    Maintainer
    Identifier ark:/88434/mds2-3042
    Data First Published 2024-01-09
    Language en
    Data Last Modified 2023-06-29 00:00:00
    Category Materials:Materials characterization, Metrology:Electrical/electromagnetic metrology
    Public Access Level public
    Data Update Frequency irregular
    Bureau Code 006:55
    Metadata Context https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
    Schema Version https://project-open-data.cio.gov/v1.1/schema
    Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
    Harvest Object Id 812162ab-fd26-4e67-94b7-213e3aaf5b51
    Harvest Source Id bce99b55-29c1-47be-b214-b8e71e9180b1
    Harvest Source Title Commerce Non Spatial Data.json Harvest Source
    Homepage URL https://data.nist.gov/od/id/mds2-3042
    License https://www.nist.gov/open/license
    Program Code 006:045
    Source Datajson Identifier True
    Source Hash 5c076d076d38adc82cd9c93fb9a15136a0f5b28dd5948d5c8a65efd1dc3c1175
    Source Schema Version 1.1

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