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Measuring the permittivity tensor of anisotropic DyScO3 to 110 GHz

Metadata Updated: June 7, 2023

DyScO3 (DSO) serves as a substrate on which to grow epitaxial thin films with extraordinary materials physics. The film properties are determined by the biaxial in-plane strain due to DyScO3's slight lattice mismatch in comparison to common perovskite films. Hence, DyScO3 is an attractive substrate for materials studies, yet its highly anisotropic permittivity makes some measurements exceedingly difficult. For instance, there are limited metrologies to characterize its permittivity at millimeter-wave frequencies that are suitable for the small lateral dimensions that DyScO3 can be grown in. To overcome this characterization gap, we tested an on-wafer method based on coplanar waveguides to measure the full anisotropic permittivity tensor from 0.1 to 110 GHz. We characterized two orthogonal sets of coplanar waveguides fabricated on each of two substrates with (001) and (110) crystallographic orientations to resolve the full permittivity tensor. To validate our measurements, we compared our results to data from dc parallel plate capacitors and THz time-domain spectroscopy. Our methodology closes the characterization gap in the complex permittivity of DyScO3 and, more generally, enables quantitative characterization of anisotropic dielectrics.

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Public: This dataset is intended for public access and use. License: See this page for license information.

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Dates

Metadata Created Date June 7, 2023
Metadata Updated Date June 7, 2023
Data Update Frequency irregular

Metadata Source

Harvested from NIST

Additional Metadata

Resource Type Dataset
Metadata Created Date June 7, 2023
Metadata Updated Date June 7, 2023
Publisher National Institute of Standards and Technology
Maintainer
Identifier ark:/88434/mds2-3026
Data First Published 2023-05-25
Language en
Data Last Modified 2023-05-22 00:00:00
Category Metrology:Electrical/electromagnetic metrology, Physics:Condensed matter
Public Access Level public
Data Update Frequency irregular
Bureau Code 006:55
Metadata Context https://project-open-data.cio.gov/v1.1/schema/data.json
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Data Standard https://www.ibis.org/touchstone_ver2.0/
Harvest Object Id 8d0d6cde-d642-40fc-ba61-05e1f357cc0d
Harvest Source Id 74e175d9-66b3-4323-ac98-e2a90eeb93c0
Harvest Source Title NIST
Homepage URL https://data.nist.gov/od/id/mds2-3026
License https://www.nist.gov/open/license
Program Code 006:045
Source Datajson Identifier True
Source Hash 7499a32a05da5343a0505dc0e504d89edb06832c
Source Schema Version 1.1

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