Text File
URL: https://data.nist.gov/od/ds/ark:/88434/mds2-2450/LDVData/W2_31_D_m02.xlsx.sha256
From the dataset abstract
SRM 3461 is an AFM sized chip with an array of seven cantilevers on each chip. The uniformity of the chips offered for sale from wafer 2 is excellent and the SRM certificate reports...
Source: Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness
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