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    • Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness

    Metadata Updated: October 27, 2022

    SRM 3461 is an AFM sized chip with an array of seven cantilevers on each chip. The uniformity of the chips offered for sale from wafer 2 is excellent and the SRM certificate reports values and uncertainties for the entire lot of chips for sale; however, this dataset provides the raw data used to certify the SRM. Since each chip is serialized, the raw data for a specific SRM chip can be accessed from this dataset. In addition to the laser Doppler vibrometry data and optical micrograph, this dataset contains the Mathematica code used to process the data. This code reads the binary file formats from the Polytec.pvd files and calculates vibration spectra and fitted peak values that are then exported into the Excel files that are being made available for each chip.

    Access & Use Information

    Public: This dataset is intended for public access and use. License: See this page for license information.

    Downloads & Resources

    References

    https://doi.org/10.1063/1.2764372
    https://doi.org/10.1088/0957-0233/17/10/041
    https://doi.org/10.1088/0957-4484/23/37/375702

    Dates

    Metadata Created Date June 22, 2022
    Metadata Updated Date October 27, 2022
    Data Update Frequency irregular

    Metadata Source

    Harvested from NIST

    Other Data Resources

    Additional Metadata

    Resource Type Dataset
    Metadata Created Date June 22, 2022
    Metadata Updated Date October 27, 2022
    Publisher National Institute of Standards and Technology
    Maintainer
    Identifier ark:/88434/mds2-2450
    Language en
    Data Last Modified 2021-08-26 00:00:00
    Rights Purchase is not required for data downloading. Users must complete registration form to download data.
    Category Metrology:Acoustic/vibration metrology, Metrology:Force metrology, Nanotechnology:Nanofabrication/manufacturing, Nanotechnology:Nanomechanics
    Public Access Level public
    Data Update Frequency irregular
    Bureau Code 006:55
    Metadata Context https://project-open-data.cio.gov/v1.1/schema/data.json
    Schema Version https://project-open-data.cio.gov/v1.1/schema
    Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
    Harvest Object Id c5721b7d-b103-436f-bed4-29ebcb1bb20c
    Harvest Source Id 74e175d9-66b3-4323-ac98-e2a90eeb93c0
    Harvest Source Title NIST
    Homepage URL https://data.nist.gov/od/id/mds2-2450
    License https://www.nist.gov/open/license
    Program Code 006:045
    Related Documents https://doi.org/10.1063/1.2764372, https://doi.org/10.1088/0957-0233/17/10/041, https://doi.org/10.1088/0957-4484/23/37/375702
    Source Datajson Identifier True
    Source Hash 77dc3b4562cee1dd13a291ff14f3dea41fa45411
    Source Schema Version 1.1

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