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Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness

Metadata Updated: October 27, 2022

SRM 3461 is an AFM sized chip with an array of seven cantilevers on each chip. The uniformity of the chips offered for sale from wafer 2 is excellent and the SRM certificate reports values and uncertainties for the entire lot of chips for sale; however, this dataset provides the raw data used to certify the SRM. Since each chip is serialized, the raw data for a specific SRM chip can be accessed from this dataset. In addition to the laser Doppler vibrometry data and optical micrograph, this dataset contains the Mathematica code used to process the data. This code reads the binary file formats from the Polytec.pvd files and calculates vibration spectra and fitted peak values that are then exported into the Excel files that are being made available for each chip.

Access & Use Information

Public: This dataset is intended for public access and use. License: See this page for license information.

Downloads & Resources

References

https://doi.org/10.1063/1.2764372
https://doi.org/10.1088/0957-0233/17/10/041
https://doi.org/10.1088/0957-4484/23/37/375702

Dates

Metadata Created Date June 22, 2022
Metadata Updated Date October 27, 2022
Data Update Frequency irregular

Metadata Source

Harvested from NIST

Additional Metadata

Resource Type Dataset
Metadata Created Date June 22, 2022
Metadata Updated Date October 27, 2022
Publisher National Institute of Standards and Technology
Maintainer
Identifier ark:/88434/mds2-2450
Language en
Data Last Modified 2021-08-26 00:00:00
Rights Purchase is not required for data downloading. Users must complete registration form to download data.
Category Metrology:Acoustic/vibration metrology, Metrology:Force metrology, Nanotechnology:Nanofabrication/manufacturing, Nanotechnology:Nanomechanics
Public Access Level public
Data Update Frequency irregular
Bureau Code 006:55
Metadata Context https://project-open-data.cio.gov/v1.1/schema/data.json
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Harvest Object Id c5721b7d-b103-436f-bed4-29ebcb1bb20c
Harvest Source Id 74e175d9-66b3-4323-ac98-e2a90eeb93c0
Harvest Source Title NIST
Homepage URL https://data.nist.gov/od/id/mds2-2450
License https://www.nist.gov/open/license
Program Code 006:045
Related Documents https://doi.org/10.1063/1.2764372, https://doi.org/10.1088/0957-0233/17/10/041, https://doi.org/10.1088/0957-4484/23/37/375702
Source Datajson Identifier True
Source Hash 77dc3b4562cee1dd13a291ff14f3dea41fa45411
Source Schema Version 1.1

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