MS Excel File
URL: https://data.nist.gov/od/ds/ark:/88434/mds2-2450/LDVData/W2_46_A_m01.xlsx
W2_46_A_m01.xlsx
Source: Calibration Data for Wafer 2 of SRM 3461 - MEMS Cantilever Stiffness
About this Resource
| Last updated | unknown |
|---|---|
| Created | unknown |
| Format | MS Excel File |
| License | other-license-specified |
| Created | 3 years ago |
| Media type | application/vnd.openxmlformats-officedocument.spreadsheetml.sheet |
| has views | False |
| id | 92f39ace-57c3-43c0-b66d-e364bbc8f1af |
| metadata modified | 3 years ago |
| package id | 89beb137-adf7-4827-9a8e-8b86156816f1 |
| position | 235 |
| state | active |
| tracking summary | {'total': 0, 'recent': 0} |