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2 datasets found
  • Federal

    NIST MEMS Calculator - SRD 166

    Department of Commerce —

    This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from...
  • Federal

    NIST MEMS Calculator - SRD 166

    National Institute of Standards and Technology —

    This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from...
2 datasets found

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