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    • NIST MEMS Calculator - SRD 166

    Metadata Updated: July 29, 2022

    This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed beams, b) strain gradient from cantilevers, c) step heights or thicknesses from step-height test structures, and d) in-plane lengths or deflections. Then, residual stress and stress gradient calculations can be made after an optical vibrometer or comparable instrument is used to obtain Young's modulus from resonating cantilevers or fixed-fixed beams. In addition, wafer bond strength is determined from micro-chevron test structures using a material test machine.

    Access & Use Information

    Public: This dataset is intended for public access and use. License: See this page for license information.

    Downloads & Resources

    References

    http://pml.nist.gov/test-structures/10-FilesToDownload/FCMN.2013.pdf
    http://pml.nist.gov/test-structures/10-FilesToDownload/ICMTS.2012.pdf
    https://www.nist.gov/news-events/news/2013/04/new-nist-measurement-tool-target-fast-growing-mems-industry
    http://ws680.nist.gov/publication/get_pdf.cfm?pub_id=914939
    http://ws680.nist.gov/publication/get_pdf.cfm?pub_id=909186
    https://dx.doi.org/10.6028/NIST.SP.260-177

    Dates

    Metadata Created Date March 11, 2021
    Metadata Updated Date July 29, 2022
    Data Update Frequency irregular

    Metadata Source

    Harvested from NIST

    Other Data Resources

    Additional Metadata

    Resource Type Dataset
    Metadata Created Date March 11, 2021
    Metadata Updated Date July 29, 2022
    Publisher National Institute of Standards and Technology
    Maintainer
    Identifier FDB5909746905200E043065706813E54152
    Language en
    Data Last Modified 2014-05-22 00:00:00
    Category Standards:Reference materials, Electronics:Semiconductors, Standards:Reference data
    Public Access Level public
    Data Update Frequency irregular
    Bureau Code 006:55
    Metadata Context https://project-open-data.cio.gov/v1.1/schema/data.json
    Schema Version https://project-open-data.cio.gov/v1.1/schema
    Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
    Harvest Object Id b08a94a1-6f15-457e-9886-f623238bdd38
    Harvest Source Id 74e175d9-66b3-4323-ac98-e2a90eeb93c0
    Harvest Source Title NIST
    Homepage URL http://pml.nist.gov/test-structures/MEMSCalculator.htm
    License https://www.nist.gov/open/license
    Program Code 006:052
    Related Documents http://pml.nist.gov/test-structures/10-FilesToDownload/FCMN.2013.pdf, http://pml.nist.gov/test-structures/10-FilesToDownload/ICMTS.2012.pdf, https://www.nist.gov/news-events/news/2013/04/new-nist-measurement-tool-target-fast-growing-mems-industry, http://ws680.nist.gov/publication/get_pdf.cfm?pub_id=914939, http://ws680.nist.gov/publication/get_pdf.cfm?pub_id=909186, https://dx.doi.org/10.6028/NIST.SP.260-177
    Source Datajson Identifier True
    Source Hash f45c3632e00a56decd1dc4cffbda92bcfc65238e
    Source Schema Version 1.1

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