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• Organization: National Institute of Standards and Technology
• Dataset Last Updated: January 23, 2018

This data set consists of several files that were created to accompany M.o.R., a shiny app created by the Surface & Nanostructure Metrology Group in the Engineering Physics Division of the...

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• Organization: National Institute of Standards and Technology
• Dataset Last Updated: January 24, 2018

Reliable optical critical dimension (OCD) metrology in the regime where the inspection wavelength λ is much larger than the critical dimensions (CDs) of the measurand is only possible using a...

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