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    • Model-Based Optical Metrology in R: M.o.R.

    Metadata Updated: September 30, 2025

    Reliable optical critical dimension (OCD) metrology in the regime where the inspection wavelength λ is much larger than the critical dimensions (CDs) of the measurand is only possible using a model-based approach. Due to the complexity of the models involved, that often require solving Maxwell's equations, many applications use a library based look-up approach. Here, the best experiment-to-theory fit is found by comparing the measurement data to a library consisting of pre-calculated simulations. One problem with this approach is that it makes the accuracy of the solution dependent on the refinement of the grid. Interpolating between library values requires a uniform grid in most cases, and can also be very time-consuming. We present an approach based on radial basis functions that is fast, accurate and most importantly works on arbitrary grids. The method is implemented in a application based on the programming language R, that additionally allows for Bayesian data analysis, and provides multiple diagnostics.

    Access & Use Information

    Public: This dataset is intended for public access and use. License: See this page for license information.

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    Dates

    Metadata Created Date November 12, 2020
    Metadata Updated Date September 30, 2025
    Data Update Frequency irregular

    Metadata Source

    Harvested from Commerce Non Spatial Data.json Harvest Source

    Other Data Resources

    Additional Metadata

    Resource Type Dataset
    Metadata Created Date November 12, 2020
    Metadata Updated Date September 30, 2025
    Publisher National Institute of Standards and Technology
    Maintainer
    Identifier 6388F53FD1DBB474E0531A57068183FF1887
    Language en
    Data Last Modified 2018-01-24
    Category Mathematics and Statistics:Uncertainty quantification, Mathematics and Statistics:Numerical methods and software, Mathematics and Statistics:Statistical analysis
    Public Access Level public
    Data Update Frequency irregular
    Bureau Code 006:55
    Metadata Context https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
    Schema Version https://project-open-data.cio.gov/v1.1/schema
    Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
    Data Dictionary https://mahenn.shinyapps.io/MoR1/
    Harvest Object Id 9d9d3bd8-cd19-4ca7-bfe1-201ea5fb1410
    Harvest Source Id bce99b55-29c1-47be-b214-b8e71e9180b1
    Harvest Source Title Commerce Non Spatial Data.json Harvest Source
    Homepage URL https://data.nist.gov/od/id/6388F53FD1DBB474E0531A57068183FF1887
    License https://www.nist.gov/open/license
    Program Code 006:045
    Source Datajson Identifier True
    Source Hash e77673f72a203d218bebd807b276e78248c7f9b5cf6fea32abd24bdab56b85d2
    Source Schema Version 1.1

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