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An example data set to demonstrate the usage of M.o.R., a shiny app for model-based metrology.

Published by National Institute of Standards and Technology | National Institute of Standards and Technology | Catalog Last Checked: August 02, 2025 at 01:54 PM | Dataset Last Updated: January 23, 2018
This data set consists of several files that were created to accompany M.o.R., a shiny app created by the Surface & Nanostructure Metrology Group in the Engineering Physics Division of the Physical Measurement Laboratory (PML) at the National Institute of Standards and Technology. It was created to simplify model-based metrology. A detailed explanation of the proper usage can be found in the M.o.R. documentation.

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