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X-ray Metrology for the Semiconductor Industry Tutorial

Metadata Updated: September 30, 2025

Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry

Access & Use Information

Public: This dataset is intended for public access and use. License: See this page for license information.

Downloads & Resources

Dates

Metadata Created Date November 12, 2020
Metadata Updated Date September 30, 2025

Metadata Source

Harvested from Commerce Non Spatial Data.json Harvest Source

Additional Metadata

Resource Type Dataset
Metadata Created Date November 12, 2020
Metadata Updated Date September 30, 2025
Publisher National Institute of Standards and Technology
Maintainer
Identifier 7CE906EBFAD7231EE0532457068153892009
Language en
Data Last Modified 2018-12-01
Category Nanotechnology:Nanoelectronics, Metrology:Dimensional metrology, Electronics:Semiconductors, Nanotechnology:Nanometrology
Public Access Level public
Bureau Code 006:55
Metadata Context https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Harvest Object Id 00c99de1-a95d-4e06-a96b-da967ec79340
Harvest Source Id bce99b55-29c1-47be-b214-b8e71e9180b1
Harvest Source Title Commerce Non Spatial Data.json Harvest Source
Homepage URL https://www.nist.gov/mml/materials-science-and-engineering-division/polymers-processing-group/x-ray-metrology
License https://www.nist.gov/open/license
Program Code 006:045
Source Datajson Identifier True
Source Hash 2652f92f7b2ad07971c1b0dc9ab2071b242037b1011198f9832d23f8ee319c80
Source Schema Version 1.1

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