X-ray Metrology for the Semiconductor Industry Tutorial
Access & Use Information
Downloads & Resources
-
DOI Access to X-ray Metrology for the...HTML
DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial
-
Landing PageLanding Page
Dates
| Metadata Created Date | November 12, 2020 |
|---|---|
| Metadata Updated Date | September 30, 2025 |
Metadata Source
- Data.json Data.json Metadata
Harvested from Commerce Non Spatial Data.json Harvest Source
Additional Metadata
| Resource Type | Dataset |
|---|---|
| Metadata Created Date | November 12, 2020 |
| Metadata Updated Date | September 30, 2025 |
| Publisher | National Institute of Standards and Technology |
| Maintainer | |
| Identifier | 7CE906EBFAD7231EE0532457068153892009 |
| Language | en |
| Data Last Modified | 2018-12-01 |
| Category | Nanotechnology:Nanoelectronics, Metrology:Dimensional metrology, Electronics:Semiconductors, Nanotechnology:Nanometrology |
| Public Access Level | public |
| Bureau Code | 006:55 |
| Metadata Context | https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld |
| Schema Version | https://project-open-data.cio.gov/v1.1/schema |
| Catalog Describedby | https://project-open-data.cio.gov/v1.1/schema/catalog.json |
| Harvest Object Id | 00c99de1-a95d-4e06-a96b-da967ec79340 |
| Harvest Source Id | bce99b55-29c1-47be-b214-b8e71e9180b1 |
| Harvest Source Title | Commerce Non Spatial Data.json Harvest Source |
| Homepage URL | https://www.nist.gov/mml/materials-science-and-engineering-division/polymers-processing-group/x-ray-metrology |
| License | https://www.nist.gov/open/license |
| Program Code | 006:045 |
| Source Datajson Identifier | True |
| Source Hash | 2652f92f7b2ad07971c1b0dc9ab2071b242037b1011198f9832d23f8ee319c80 |
| Source Schema Version | 1.1 |
Didn't find what you're looking for? Suggest a dataset here.