{"@type": "dcat:Dataset", "accessLevel": "public", "bureauCode": ["006:55"], "contactPoint": {"fn": "Regis Kline", "hasEmail": "mailto:r.kline@nist.gov"}, "description": "Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry", "distribution": [{"accessURL": "https://doi.org/10.18434/T4/1503330", "description": "DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial", "format": "text/html", "title": "DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial"}], "identifier": "7CE906EBFAD7231EE0532457068153892009", "keyword": ["Semiconductor metrology", "dimensional metrology", "small angle x-ray scattering"], "landingPage": "https://www.nist.gov/mml/materials-science-and-engineering-division/polymers-processing-group/x-ray-metrology", "language": ["en"], "license": "https://www.nist.gov/open/license", "modified": "2018-12-01", "programCode": ["006:045"], "publisher": {"@type": "org:Organization", "name": "National Institute of Standards and Technology"}, "theme": ["Electronics:Semiconductors", "Metrology:Dimensional metrology", "Nanotechnology:Nanoelectronics", "Nanotechnology:Nanometrology"], "title": "X-ray Metrology for the Semiconductor Industry Tutorial"}