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    • Supporting Data for Selected Area Electron Beam Induced Deposition of Pt and W for EBSD Backgrounds

    Metadata Updated: September 30, 2025

    These are the unprocessed electron back scatter diffraction patterns (EBSPs) collected from the mesas of electron beam induced deposition (EBID) material, in addition to the Mathematica notebook used to process the images. Each of the 12 EBID mesa has 10 EBSPs collected at 20 kV and 10 kV, in addition to several longer line scans that step from the silicon substrate onto the EBID mesa.

    Access & Use Information

    Public: This dataset is intended for public access and use. License: See this page for license information.

    Downloads & Resources

    Dates

    Metadata Created Date November 12, 2020
    Metadata Updated Date September 30, 2025

    Metadata Source

    Harvested from Commerce Non Spatial Data.json Harvest Source

    Other Data Resources

    Additional Metadata

    Resource Type Dataset
    Metadata Created Date November 12, 2020
    Metadata Updated Date September 30, 2025
    Publisher National Institute of Standards and Technology
    Maintainer
    Identifier 77D21EEB60F37A2BE053245706819FDB1978
    Language en
    Data Last Modified 2018-10-17
    Category Materials:Materials characterization, Nanotechnology:Nanomechanics, Nanotechnology:Nanometrology, Electronics:Semiconductors
    Public Access Level public
    Bureau Code 006:55
    Metadata Context https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
    Schema Version https://project-open-data.cio.gov/v1.1/schema
    Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
    Harvest Object Id 9a66ce4b-8421-45af-a3b7-3b6112a86006
    Harvest Source Id bce99b55-29c1-47be-b214-b8e71e9180b1
    Harvest Source Title Commerce Non Spatial Data.json Harvest Source
    Homepage URL https://data.nist.gov/od/id/77D21EEB60F37A2BE053245706819FDB1978
    License https://www.nist.gov/open/license
    Program Code 006:045
    Source Datajson Identifier True
    Source Hash ec185e35a9557b32f9d7ff8b0cfee9ad95d7bcde4cf2a1856a66cd73e7fda030
    Source Schema Version 1.1

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