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Scanning transmission electron tomography of in-plane gate-all-around transistors from a commercially available device
Electron tomography tilt series data, reconstruction, and data processing code for three-dimensional imaging of a gate-all-around (GAA) transistor layer extracted from a commercially available chip.
This data was collected on July 21, 2025.
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Complete Metadata
| @type | dcat:Dataset |
|---|---|
| accessLevel | public |
| accrualPeriodicity | irregular |
| bureauCode |
[ "006:55" ] |
| contactPoint |
{ "fn": "Andrew Herzing", "hasEmail": "mailto:andrew.herzing@nist.gov" } |
| description | Electron tomography tilt series data, reconstruction, and data processing code for three-dimensional imaging of a gate-all-around (GAA) transistor layer extracted from a commercially available chip. This data was collected on July 21, 2025. |
| distribution |
[ { "title": "README", "mediaType": "text/plain", "downloadURL": "https://data.nist.gov/od/ds/mds2-4257/README.txt" }, { "title": "STEM HAADF Tomography GAA", "mediaType": "application/x-zip-compressed", "downloadURL": "https://data.nist.gov/od/ds/mds2-4257/STEM_HAADF_Tomography_GAA_InPlane.zip" } ] |
| identifier | ark:/88434/mds2-4257 |
| issued | 2026-08-26 |
| keyword |
[ "3D", "CHIPS", "HAADF", "STEM", "gate-all-around", "nanocharacterization", "tomography", "transistor" ] |
| landingPage | https://data.nist.gov/od/id/mds2-4257 |
| language |
[ "en" ] |
| license | https://www.nist.gov/open/license |
| modified | 2026-07-22 00:00:00 |
| programCode |
[ "006:045" ] |
| publisher |
{ "name": "National Institute of Standards and Technology", "@type": "org:Organization" } |
| theme |
[ "Electronics:Semiconductors", "Materials:Materials characterization" ] |
| title | Scanning transmission electron tomography of in-plane gate-all-around transistors from a commercially available device |
