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    • Optical scattering measurements and simulation data for one-dimensional (1-D) patterned periodic sub-wavelength features

    Metadata Updated: July 29, 2022

    This data set consists of both measured and simulated optical intensities scattered off periodic line arrays, with simulations based upon an average geometric model for these lines. These data were generated in order to determine the average feature sizes based on optical scattering, which is an inverse problem for which solutions to the forward problem are calculated using electromagnetic simulations after a parameterization of the feature geometry. Here, the array of features measured and modeled is periodic in one-dimension (i.e., a line grating) with a nominal line width of 100 nm placed at 300 nm intervals, or pitch = 300 nm; the short-hand label for the features is "L100P300." The entirety of the modeled data is included, over two thousand simulations that are indexed using a top, middle, and bottom linewidth as floating parameters. Two subsets of these data, featuring differing sampling strategies, are also provided. This data set also contains angle-resolved optical measurements with uncertainties for nine arrays which differ in their dimensions due to lithographic variations using a focus/exposure matrix, as identified in a previous publication (https://doi.org/10.1117/12.777131). We have previously reported line widths determined from these measurements based upon non-linear regression to compare theory to experiment. Machine learning approaches are to be fostered for solving such inverse problems. Data are formatted for direct use in "Model-Based Optical Metrology in R: MoR" software which is also available from data.nist.gov. (https://doi.org/10.18434/T4/1426859). Note: Certain commercial materials are identified in this dataset in order to specify the experimental procedure adequately. Such identification is not intended to imply recommendation or endorsement by the National Institute of Standards and Technology, nor is it intended to imply that the materials are necessarily the best available for the purpose.

    Access & Use Information

    Public: This dataset is intended for public access and use. License: See this page for license information.

    Downloads & Resources

    References

    https://dx.doi.org/10.1117/12.816569
    https://dx.doi.org/10.1117/12.827676
    https://dx.doi.org/10.1364/AO.51.006196
    https://dx.doi.org/10.1088/1361-6501/aa5586
    https://dx.doi.org/10.1117/12.2551504

    Dates

    Metadata Created Date March 11, 2021
    Metadata Updated Date July 29, 2022
    Data Update Frequency irregular

    Metadata Source

    Harvested from NIST

    Other Data Resources

    Additional Metadata

    Resource Type Dataset
    Metadata Created Date March 11, 2021
    Metadata Updated Date July 29, 2022
    Publisher National Institute of Standards and Technology
    Maintainer
    Identifier ark:/88434/mds2-2290
    Data First Published 2021-01-05
    Language en
    Data Last Modified 2020-08-14 00:00:00
    Rights Certain commercial materials are identified in this dataset in order to specify the experimental procedure adequately. Such identification is not intended to imply recommendation or endorsement by the National Institute of Standards and Technology, nor i
    Category Nanotechnology:Nanometrology, Metrology:Dimensional metrology, Manufacturing:Process measurement and control
    Public Access Level public
    Data Update Frequency irregular
    Bureau Code 006:55
    Metadata Context https://project-open-data.cio.gov/v1.1/schema/data.json
    Schema Version https://project-open-data.cio.gov/v1.1/schema
    Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
    Harvest Object Id 9639f70e-098c-4388-ac81-a72c5b8cf74b
    Harvest Source Id 74e175d9-66b3-4323-ac98-e2a90eeb93c0
    Harvest Source Title NIST
    Homepage URL https://data.nist.gov/od/id/mds2-2290
    License https://www.nist.gov/open/license
    Program Code 006:045
    Related Documents https://dx.doi.org/10.1117/12.816569, https://dx.doi.org/10.1117/12.827676, https://dx.doi.org/10.1364/AO.51.006196, https://dx.doi.org/10.1088/1361-6501/aa5586, https://dx.doi.org/10.1117/12.2551504
    Source Datajson Identifier True
    Source Hash dcb09331ff097ad0d9c10bb2cde6b6590f911201
    Source Schema Version 1.1

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