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NIST Electron Effective-Attenuation-Length Database - SRD 82

Metadata Updated: March 12, 2024

The NIST Electron Effective Attenuation Length Database provides values of electron effective attenuation lengths (EALs) in materials at user-selected electron energies between 50 eV and 2,000 eV. The database was designed mainly to provide EALs (to account for effects of elastic-electron scattering) for measurements of the thicknesses of overlayer films and, to a much lesser extent, for measurements of the depths of thin marker layers. EALs are calculated using an algorithm based on electron transport theory for measurement conditions specified by the user. A critical review on the EAL has been published [A. Jablonski and C. J. Powell, Surf. Science Reports 47, 33 (2002)], and simple practical expressions for the EAL, mean escape depth, and information depth are given in another paper by the same authors [J. Vac. Sci. Technol. A 27, 253 (2009)].

Access & Use Information

Public: This dataset is intended for public access and use. License: See this page for license information.

Downloads & Resources

References

https://www.nist.gov/system/files/documents/srd/SRD82UsersGuideV1-3.pdf
https://dx.doi.org/10.1116/1.3071947

Dates

Metadata Created Date March 11, 2021
Metadata Updated Date March 12, 2024
Data Update Frequency irregular

Metadata Source

Harvested from NIST

Additional Metadata

Resource Type Dataset
Metadata Created Date March 11, 2021
Metadata Updated Date March 12, 2024
Publisher National Institute of Standards and Technology
Maintainer
Identifier ECBCC1C130092ED9E04306570681B10715
Language en
Data Last Modified 2011-01-01 00:00:00
Category Standards:Reference data
Public Access Level public
Data Update Frequency irregular
Bureau Code 006:55
Metadata Context https://project-open-data.cio.gov/v1.1/schema/data.json
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Harvest Object Id 9eeaebb9-6a56-4907-916f-628499786a5e
Harvest Source Id 74e175d9-66b3-4323-ac98-e2a90eeb93c0
Harvest Source Title NIST
Homepage URL https://www.nist.gov/srd/nist-standard-reference-database-82
License https://www.nist.gov/open/license
Program Code 006:052
Related Documents https://www.nist.gov/system/files/documents/srd/SRD82UsersGuideV1-3.pdf, https://dx.doi.org/10.1116/1.3071947
Source Datajson Identifier True
Source Hash 7c6427ed8601cd3d83e6141a939f5ff60dbfe25203addf99701f43a7c1adb105
Source Schema Version 1.1

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