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    • NIST Electron Effective-Attenuation-Length Database - SRD 82

    Metadata Updated: September 30, 2025

    The NIST Electron Effective Attenuation Length Database provides values of electron effective attenuation lengths (EALs) in materials at user-selected electron energies between 50 eV and 2,000 eV. The database was designed mainly to provide EALs (to account for effects of elastic-electron scattering) for measurements of the thicknesses of overlayer films and, to a much lesser extent, for measurements of the depths of thin marker layers. EALs are calculated using an algorithm based on electron transport theory for measurement conditions specified by the user. A critical review on the EAL has been published [A. Jablonski and C. J. Powell, Surf. Science Reports 47, 33 (2002)], and simple practical expressions for the EAL, mean escape depth, and information depth are given in another paper by the same authors [J. Vac. Sci. Technol. A 27, 253 (2009)].

    Access & Use Information

    Public: This dataset is intended for public access and use. License: See this page for license information.

    Downloads & Resources

    References

    https://www.nist.gov/system/files/documents/srd/SRD82UsersGuideV1-3.pdf
    https://dx.doi.org/10.1116/1.3071947

    Dates

    Metadata Created Date November 12, 2020
    Metadata Updated Date September 30, 2025
    Data Update Frequency irregular

    Metadata Source

    Harvested from Commerce Non Spatial Data.json Harvest Source

    Other Data Resources

    Additional Metadata

    Resource Type Dataset
    Metadata Created Date November 12, 2020
    Metadata Updated Date September 30, 2025
    Publisher National Institute of Standards and Technology
    Maintainer
    Identifier ECBCC1C130092ED9E04306570681B10715
    Language en
    Data Last Modified 2011-01-01 00:00:00
    Category Standards:Reference data
    Public Access Level public
    Data Update Frequency irregular
    Bureau Code 006:55
    Metadata Context https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
    Schema Version https://project-open-data.cio.gov/v1.1/schema
    Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
    Harvest Object Id 6b637495-d4ce-43a7-81b7-ed46382c862f
    Harvest Source Id bce99b55-29c1-47be-b214-b8e71e9180b1
    Harvest Source Title Commerce Non Spatial Data.json Harvest Source
    Homepage URL https://www.nist.gov/srd/nist-standard-reference-database-82
    License https://www.nist.gov/open/license
    Program Code 006:052
    Related Documents https://www.nist.gov/system/files/documents/srd/SRD82UsersGuideV1-3.pdf, https://dx.doi.org/10.1116/1.3071947
    Source Datajson Identifier True
    Source Hash b4f6f5cdea361b8c10ee1ad2d538806ececfacb249ed317412b0a727fbd12647
    Source Schema Version 1.1

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