KLA stylus profilometry of Parylene C devices
We obtained stylus profilometry measurements of Parylene C devices after soaking in different fluid conditions in a microfluidic environment. The Parylene C devices consist of platinum coplanar waveguides (400 nm Pt, 50 um center conductor, 5 um gaps, 200 um ground planes) with 6.5 um of Parylene C deposited on top. A PDMS microfluidic layer was aligned on top of the 10.00 mm CPW such that the 4.00 mm channel was centered on the CPW. The Parylene C device was subjected to one of three fluid conditions over a 2 month soaking period: H2O at 20 degrees Celsius, 1xPBS (phosphate-buffered saline) at 20 degrees Celsius, or 1xPBS at 37 degrees Celsius. The cross-sectional profile of the CPW was measured in three locations along the channel before and after soaking in each fluid. Here we give these topographical profiles for each Parylene C device we measured.
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KLA profilometry of Parylene C devices
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Complete Metadata
| @type | dcat:Dataset |
|---|---|
| accessLevel | public |
| accrualPeriodicity | irregular |
| bureauCode |
[ "006:55" ] |
| contactPoint |
{ "fn": "Jacob Pawlik", "hasEmail": "mailto:jacob.pawlik@nist.gov" } |
| description | We obtained stylus profilometry measurements of Parylene C devices after soaking in different fluid conditions in a microfluidic environment. The Parylene C devices consist of platinum coplanar waveguides (400 nm Pt, 50 um center conductor, 5 um gaps, 200 um ground planes) with 6.5 um of Parylene C deposited on top. A PDMS microfluidic layer was aligned on top of the 10.00 mm CPW such that the 4.00 mm channel was centered on the CPW. The Parylene C device was subjected to one of three fluid conditions over a 2 month soaking period: H2O at 20 degrees Celsius, 1xPBS (phosphate-buffered saline) at 20 degrees Celsius, or 1xPBS at 37 degrees Celsius. The cross-sectional profile of the CPW was measured in three locations along the channel before and after soaking in each fluid. Here we give these topographical profiles for each Parylene C device we measured. |
| distribution |
[ { "title": "KLA profilometry of Parylene C devices", "mediaType": "application/x-zip-compressed", "description": "Cross-sectional profiles of Pt CPWs coated in Parylene C and soaked in different microfluidic fluid conditions.", "downloadURL": "https://data.nist.gov/od/ds/mds2-2809/Profilometry.zip" }, { "title": "README", "mediaType": "text/plain", "downloadURL": "https://data.nist.gov/od/ds/mds2-2809/2809_README_edit.txt" } ] |
| identifier | ark:/88434/mds2-2809 |
| issued | 2023-01-04 |
| keyword |
[ "Microwave microfluidic spectroscopy", "Parylene C", "S-parameters", "biomedical devices", "dielectric spectroscopy", "implantable devices", "profilometry" ] |
| landingPage | https://data.nist.gov/od/id/mds2-2809 |
| language |
[ "en" ] |
| license | https://www.nist.gov/open/license |
| modified | 2022-07-22 00:00:00 |
| programCode |
[ "006:045" ] |
| publisher |
{ "name": "National Institute of Standards and Technology", "@type": "org:Organization" } |
| theme |
[ "Bioscience:Biomaterials", "Electronics:Electromagnetics", "Materials:Materials characterization", "Metrology:Electrical/electromagnetic metrology", "Physics:Spectroscopy" ] |
| title | KLA stylus profilometry of Parylene C devices |
