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    • KLA stylus profilometry of Parylene C devices

    Metadata Updated: January 7, 2023

    We obtained stylus profilometry measurements of Parylene C devices after soaking in different fluid conditions in a microfluidic environment. The Parylene C devices consist of platinum coplanar waveguides (400 nm Pt, 50 um center conductor, 5 um gaps, 200 um ground planes) with 6.5 um of Parylene C deposited on top. A PDMS microfluidic layer was aligned on top of the 10.00 mm CPW such that the 4.00 mm channel was centered on the CPW. The Parylene C device was subjected to one of three fluid conditions over a 2 month soaking period: H2O at 20 degrees Celsius, 1xPBS (phosphate-buffered saline) at 20 degrees Celsius, or 1xPBS at 37 degrees Celsius. The cross-sectional profile of the CPW was measured in three locations along the channel before and after soaking in each fluid. Here we give these topographical profiles for each Parylene C device we measured.

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    Public: This dataset is intended for public access and use. License: See this page for license information.

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    Dates

    Metadata Created Date January 7, 2023
    Metadata Updated Date January 7, 2023
    Data Update Frequency irregular

    Metadata Source

    Harvested from NIST

    Other Data Resources

    Additional Metadata

    Resource Type Dataset
    Metadata Created Date January 7, 2023
    Metadata Updated Date January 7, 2023
    Publisher National Institute of Standards and Technology
    Maintainer
    Identifier ark:/88434/mds2-2809
    Data First Published 2023-01-04
    Language en
    Data Last Modified 2022-07-22 00:00:00
    Category Bioscience:Biomaterials, Electronics:Electromagnetics, Materials:Materials characterization, Metrology:Electrical/electromagnetic metrology, Physics:Spectroscopy
    Public Access Level public
    Data Update Frequency irregular
    Bureau Code 006:55
    Metadata Context https://project-open-data.cio.gov/v1.1/schema/data.json
    Schema Version https://project-open-data.cio.gov/v1.1/schema
    Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
    Harvest Object Id 7c21b7be-bf1a-41d1-9c10-01b82bc1d978
    Harvest Source Id 74e175d9-66b3-4323-ac98-e2a90eeb93c0
    Harvest Source Title NIST
    Homepage URL https://data.nist.gov/od/id/mds2-2809
    License https://www.nist.gov/open/license
    Program Code 006:045
    Source Datajson Identifier True
    Source Hash 9329a68776a90f87658526e6f1023a295fe82c0e
    Source Schema Version 1.1

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