{"@type": "dcat:Dataset", "accessLevel": "public", "accrualPeriodicity": "irregular", "bureauCode": ["006:55"], "contactPoint": {"fn": "Jacob Pawlik", "hasEmail": "mailto:jacob.pawlik@nist.gov"}, "description": "We obtained stylus profilometry measurements of Parylene C devices after soaking in different fluid conditions in a microfluidic environment. The Parylene C devices consist of platinum coplanar waveguides (400 nm Pt, 50 um center conductor, 5 um gaps, 200 um ground planes) with 6.5 um of Parylene C deposited on top. A PDMS microfluidic layer was aligned on top of the 10.00 mm CPW such that the 4.00 mm channel was centered on the CPW. The Parylene C device was subjected to one of three fluid conditions over a 2 month soaking period: H2O at 20 degrees Celsius, 1xPBS (phosphate-buffered saline) at 20 degrees Celsius, or 1xPBS at 37 degrees Celsius. The cross-sectional profile of the CPW was measured in three locations along the channel before and after soaking in each fluid. Here we give these topographical profiles for each Parylene C device we measured.", "distribution": [{"description": "Cross-sectional profiles of Pt CPWs coated in Parylene C and soaked in different microfluidic fluid conditions.", "downloadURL": "https://data.nist.gov/od/ds/mds2-2809/Profilometry.zip", "mediaType": "application/x-zip-compressed", "title": "KLA profilometry of Parylene C devices"}, {"downloadURL": "https://data.nist.gov/od/ds/mds2-2809/2809_README_edit.txt", "mediaType": "text/plain", "title": "README"}], "identifier": "ark:/88434/mds2-2809", "issued": "2023-01-04", "keyword": ["Microwave microfluidic spectroscopy", "Parylene C", "S-parameters", "biomedical devices", "dielectric spectroscopy", "implantable devices", "profilometry"], "landingPage": "https://data.nist.gov/od/id/mds2-2809", "language": ["en"], "license": "https://www.nist.gov/open/license", "modified": "2022-07-22 00:00:00", "programCode": ["006:045"], "publisher": {"@type": "org:Organization", "name": "National Institute of Standards and Technology"}, "theme": ["Bioscience:Biomaterials", "Electronics:Electromagnetics", "Materials:Materials characterization", "Metrology:Electrical/electromagnetic metrology", "Physics:Spectroscopy"], "title": "KLA stylus profilometry of Parylene C devices"}