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Federal
Geometries and material properties for simulating semiconductor patterned bridge defects using the finite-difference time-domain (FDTD) method
Department of Commerce —
An in-house developed finite-difference time-domain (FDTD) code has been used to simulate certain patterned defects as found in the semiconductor industry. Intrinsic... -
Federal
Geometries and material properties for simulating semiconductor patterned bridge defects using the finite-difference time-domain (FDTD) method
National Institute of Standards and Technology —
An in-house developed finite-difference time-domain (FDTD) code has been used to simulate certain patterned defects as found in the semiconductor industry. Intrinsic...