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#1 Federal
Model-Based Optical Metrology in R: M.o.R.
- Organization: Department of Commerce
- Dataset Last Updated: January 24, 2018
Reliable optical critical dimension (OCD) metrology in the regime where the inspection wavelength λ is much larger than the critical dimensions (CDs) of the measurand is only possible using a...
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Search relevance: 360.80 | Views last month: 0 | Catalog Last Checked: October 02, 2026 at 07:51 PM
#2 Federal
Model-Based Optical Metrology in R: M.o.R.
- Organization: National Institute of Standards and Technology
- Dataset Last Updated: January 24, 2018
Reliable optical critical dimension (OCD) metrology in the regime where the inspection wavelength λ is much larger than the critical dimensions (CDs) of the measurand is only possible using a...
- HTML
- PDF
- TXT
- ZIP
- TXT
Search relevance: 352.10 | Views last month: 3 | Catalog Last Checked: September 10, 2026 at 05:51 PM

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