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X-ray Metrology for the Semiconductor Industry Tutorial
Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry
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1 resource available
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DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial
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Complete Metadata
| @type | dcat:Dataset |
|---|---|
| accessLevel | public |
| bureauCode |
[ "006:55" ] |
| contactPoint |
{ "fn": "Regis Kline", "hasEmail": "mailto:r.kline@nist.gov" } |
| description | Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry |
| distribution |
[ { "title": "DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial", "format": "text/html", "accessURL": "https://doi.org/10.18434/T4/1503330", "description": "DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial" } ] |
| identifier | 7CE906EBFAD7231EE0532457068153892009 |
| keyword |
[ "Semiconductor metrology", "dimensional metrology", "small angle x-ray scattering" ] |
| landingPage | https://www.nist.gov/mml/materials-science-and-engineering-division/polymers-processing-group/x-ray-metrology |
| language |
[ "en" ] |
| license | https://www.nist.gov/open/license |
| modified | 2018-12-01 |
| programCode |
[ "006:045" ] |
| publisher |
{ "name": "National Institute of Standards and Technology", "@type": "org:Organization" } |
| theme |
[ "Electronics:Semiconductors", "Metrology:Dimensional metrology", "Nanotechnology:Nanoelectronics", "Nanotechnology:Nanometrology" ] |
| title | X-ray Metrology for the Semiconductor Industry Tutorial |
