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X-ray Metrology for the Semiconductor Industry Tutorial

Metadata Updated: July 29, 2022

Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry

Access & Use Information

Public: This dataset is intended for public access and use. License: See this page for license information.

Downloads & Resources

Dates

Metadata Created Date March 11, 2021
Metadata Updated Date July 29, 2022

Metadata Source

Harvested from NIST

Additional Metadata

Resource Type Dataset
Metadata Created Date March 11, 2021
Metadata Updated Date July 29, 2022
Publisher National Institute of Standards and Technology
Maintainer
Identifier 7CE906EBFAD7231EE0532457068153892009
Language en
Data Last Modified 2018-12-01
Category Nanotechnology:Nanoelectronics, Metrology:Dimensional metrology, Electronics:Semiconductors, Nanotechnology:Nanometrology
Public Access Level public
Bureau Code 006:55
Metadata Context https://project-open-data.cio.gov/v1.1/schema/data.json
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Harvest Object Id 61c2392a-339b-47ce-ab50-85a39277abe1
Harvest Source Id 74e175d9-66b3-4323-ac98-e2a90eeb93c0
Harvest Source Title NIST
Homepage URL https://www.nist.gov/mml/materials-science-and-engineering-division/polymers-processing-group/x-ray-metrology
License https://www.nist.gov/open/license
Program Code 006:045
Source Datajson Identifier True
Source Hash 630cf6a7febe4f019d4d335d2b7dfc9163915b45
Source Schema Version 1.1

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