X-ray Metrology for the Semiconductor Industry Tutorial
Access & Use Information
Public: This dataset is intended for public access and use.
License:
See this page for license information.
Downloads & Resources
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DOI Access to X-ray Metrology for the...HTML
DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial
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Landing PageLanding Page
Dates
| Metadata Created Date | March 11, 2021 |
|---|---|
| Metadata Updated Date | July 29, 2022 |
Metadata Source
- Data.json Data.json Metadata
Harvested from NIST
Additional Metadata
| Resource Type | Dataset |
|---|---|
| Metadata Created Date | March 11, 2021 |
| Metadata Updated Date | July 29, 2022 |
| Publisher | National Institute of Standards and Technology |
| Maintainer | |
| Identifier | 7CE906EBFAD7231EE0532457068153892009 |
| Language | en |
| Data Last Modified | 2018-12-01 |
| Category | Nanotechnology:Nanoelectronics, Metrology:Dimensional metrology, Electronics:Semiconductors, Nanotechnology:Nanometrology |
| Public Access Level | public |
| Bureau Code | 006:55 |
| Metadata Context | https://project-open-data.cio.gov/v1.1/schema/data.json |
| Schema Version | https://project-open-data.cio.gov/v1.1/schema |
| Catalog Describedby | https://project-open-data.cio.gov/v1.1/schema/catalog.json |
| Harvest Object Id | 61c2392a-339b-47ce-ab50-85a39277abe1 |
| Harvest Source Id | 74e175d9-66b3-4323-ac98-e2a90eeb93c0 |
| Harvest Source Title | NIST |
| Homepage URL | https://www.nist.gov/mml/materials-science-and-engineering-division/polymers-processing-group/x-ray-metrology |
| License | https://www.nist.gov/open/license |
| Program Code | 006:045 |
| Source Datajson Identifier | True |
| Source Hash | 630cf6a7febe4f019d4d335d2b7dfc9163915b45 |
| Source Schema Version | 1.1 |
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