We developed and tested a new method for in situ characterization and distribution of inorganic particles in biopsied lung tissue from three diverse human subject groups using field emission scanning electron microscopy with an energy dispersive analyzer. The following .csv files summarize the inorganic particle identifications made in each frame of each area for each subject in the study. The In_Situ_Frame_Summary_2016-09-09_NJH.csv is a tabulation of the phases identified in each frame. The In Situ Area Summary_2016-09-09.csv totals the number of times each phase was identified in an area of the lung tissue biopsy for each subject from the In_Situ_Frame_Summary_2016-09-09_NJH.csv. The In Situ Subject Summary_2016-09-09.csv totals the number of times each phase was identified from all areas for each subject from the In Situ Area Summary_2016-09-09.csv. The Digestion Summary_2016-09-09.csv totals the number of times each phase was identified in the filtered digested tissue material.