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    • S-parameters of Parylene C microwave microfluidic devices

    Metadata Updated: September 30, 2025

    Broadband S-parameter measurements of Parylene C microwave microfluidic devices from 100 MHz - 110 GHz. The Parylene C devices consisted of 400 nm platinum coplanar waveguides (CPW) (50 um center conductor, 5 um gaps, 200 um ground planes) deposited on fused silica with 6.5 um of Parylene C on top, capped with a PDMS microfluidic layer aligned over the CPWs. The dimensions of the PDMS microfluidic channels were approximately 210 um wide by 100 um deep. The total CPW line length was 10.000 mm and the channel length was 4.160 mm, where the channel was aligned over the center of the CPW. We measured the S-parameters of Parylene C devices filled with three different fluid conditions at different intervals over a 2 month period: H2O at 20 degrees Celsius, 1xPBS (phosphate-buffered saline) at 20 degrees Celsius, and 1xPBS at 37 degrees Celsius. We obtained measurements of both the fluid-filled and empty channel at each measurement day. We measured broadband S-parameters with a vector network analyzer and extender heads at a source power of -17 dBm on a temperature-controlled probe station. The S-parameters were calibrated to the probe tips with measurements of a gold reference chip in combination with multiline TRL in the NIST Microwave Uncertainty Framework. The differences in S-parameters from day 0 were plotted over time to observe changes in the dielectric properties of the Parylene C device during soaking.

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    Public: This dataset is intended for public access and use. License: See this page for license information.

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    Dates

    Metadata Created Date September 30, 2025
    Metadata Updated Date September 30, 2025
    Data Update Frequency irregular

    Metadata Source

    Harvested from Commerce Non Spatial Data.json Harvest Source

    Other Data Resources

    Additional Metadata

    Resource Type Dataset
    Metadata Created Date September 30, 2025
    Metadata Updated Date September 30, 2025
    Publisher National Institute of Standards and Technology
    Maintainer
    Identifier ark:/88434/mds2-2808
    Data First Published 2023-01-04
    Language en
    Data Last Modified 2022-10-03 00:00:00
    Category Bioscience:Biomaterials, Electronics:Electromagnetics, Materials:Polymers, Metrology:Electrical/electromagnetic metrology, Physics:Spectroscopy
    Public Access Level public
    Data Update Frequency irregular
    Bureau Code 006:55
    Metadata Context https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
    Schema Version https://project-open-data.cio.gov/v1.1/schema
    Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
    Harvest Object Id 7b9e38e1-544e-42da-a226-04d88e8c7d2b
    Harvest Source Id bce99b55-29c1-47be-b214-b8e71e9180b1
    Harvest Source Title Commerce Non Spatial Data.json Harvest Source
    Homepage URL https://data.nist.gov/od/id/mds2-2808
    License https://www.nist.gov/open/license
    Program Code 006:045
    Source Datajson Identifier True
    Source Hash 9897f4a2454d5eefc41cda40477873278bf125642beddd64bd2e777ce5867b5e
    Source Schema Version 1.1

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