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Patent AT-E400897-T1: [Translated] SEMICONDUCTOR COMPONENT WITH SUPERPARAELECTRIC GATE INSULATOR

Published by National Center for Biotechnology Information (NCBI) | U.S. Department of Health & Human Services | Catalog Last Checked: September 07, 2025 at 12:15 PM | Dataset Last Updated: September 06, 2025
A semiconductor device includes a channel region 18 of semiconductor, a conductive gate electrode 12 adjacent to the channel region 18 and a gate dielectric 10 between the conductive gate electrode 12 and the channel region 18. The gate dielectric 10 is formed of a material that is a ferroelectric in bulk but in a superparaelectric state. The gate dielectric may be for instance of formula AXO3, where A is a group I or II element, and X is titanium, niobium, zirconium and/or hafnium. Such a gate dielectric 10 may be formed for example by low temperature deposition of the gate dielectric 10 or by using dopants of metal oxides to prevent domain growth, or both.

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