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Patent AT-E400672-T1: [Translated] METHOD FOR FORMING AN ANTIREFLECTION COATING

Published by National Center for Biotechnology Information (NCBI) | U.S. Department of Health & Human Services | Catalog Last Checked: September 10, 2026 at 08:26 PM | Dataset Last Updated: September 05, 2025
Silsesquioxane resins useful in forming the antireflective coating having the formula (PhSiO(3-x)/2(OH)x)mHSiO(3-x)/2(OH)x)n(MeSiO(3-x)/2(OH)x)p(RSiO(3-x)/2(OH)x)q where Ph is a phenyl group, Me is a methyl group, R is selected from ester groups and polyether groups, x has a value of 0, 1 or 2; m has a value of 0.05 to 0.95, n has a value of 0.05 to 0.95, p has a value of 0.05 to 0.95, q has a value of 0.01 to 0.30 and m+n+p+q≈1.

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