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NIST Electron Elastic-Scattering Cross-Section Database - SRD 64

Metadata Updated: September 30, 2025

Note that this SRD supersedes SRD 64 Version 3.2. The NIST Electron Elastic-Scattering Cross-Section Database provides values of differential elastic-scattering cross sections, total elastic-scattering cross sections, phase shifts, and transport cross sections in electron-atom scattering for elements with atomic numbers from 1 to 96 and for electron energies between 50 eV and 300 keV (in steps of 1 eV). Knowledge of elastic-scattering effects is important for the development of theoretical models for quantitative analysis by Auger-electron spectroscopy, X-ray photoelectron spectroscopy, electron microprobe analysis, and analytical electron microscopy. These data are also needed for modeling of electron transport in radiation dosimetry, electron-beam lithography, and interactions of ionizing radiation with matter. The database is designed to facilitate simulations of electron transport for these and similar applications in which electron energies from 50 eV to 300 keV are utilized. An analysis of available elastic-scattering cross-section data has been published [A. Jablonski, F. Salvat, and C. J. Powell, J. Phys. Chem. Ref. Data 33, 409 (2004)].

Access & Use Information

Public: This dataset is intended for public access and use. License: See this page for license information.

Downloads & Resources

References

http://dx.doi.org/10.6028/NIST.NSRDS.64

Dates

Metadata Created Date November 12, 2020
Metadata Updated Date September 30, 2025
Data Update Frequency irregular

Metadata Source

Harvested from Commerce Non Spatial Data.json Harvest Source

Additional Metadata

Resource Type Dataset
Metadata Created Date November 12, 2020
Metadata Updated Date September 30, 2025
Publisher National Institute of Standards and Technology
Maintainer
Identifier 75AF41FBDA802C07E0532457068152421966
Language en
Data Last Modified 2012-01-01 00:00:00
Category Physics:Spectroscopy, Materials, Standards:Reference data
Public Access Level public
Data Update Frequency irregular
Bureau Code 006:55
Metadata Context https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
Schema Version https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
Harvest Object Id 8f1536d1-b37c-4388-a6f8-1061868956b8
Harvest Source Id bce99b55-29c1-47be-b214-b8e71e9180b1
Harvest Source Title Commerce Non Spatial Data.json Harvest Source
Homepage URL https://srdata.nist.gov/srd64
License https://www.nist.gov/open/license
Program Code 006:045
Related Documents http://dx.doi.org/10.6028/NIST.NSRDS.64
Source Datajson Identifier True
Source Hash d1af90f34e6b1f9d480358dfb9940ed456a90ba1e2df85a82f028390c7cbba9b
Source Schema Version 1.1

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