Text File
URL: https://data.nist.gov/od/ds/6388F53FD1DBB474E0531A57068183FF1887/MoR_Documentation.pdf.sha256
From the dataset abstract
Reliable optical critical dimension (OCD) metrology in the regime where the inspection wavelength λ is much larger than the critical dimensions (CDs) of the measurand is only possible...
Source: Model-Based Optical Metrology in R: M.o.R.
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