Text File
URL: https://data.nist.gov/od/ds/6A4A339C5C091C09E053245706817F211916/README.txt.sha256
From the dataset abstract
An in-house developed finite-difference time-domain (FDTD) code has been used to simulate certain patterned defects as found in the semiconductor industry. Intrinsic to FDTD is the...
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