Detection Limits for SEM Image Segmentation

Metadata Updated: September 30, 2025

The dataset consists of six collections of SEM images, three trained U-net AI models, and CSV files with image quality metrics and trained AI model accuracy metrics. Each SEM image collection contains images augmented with Poisson noise and contrast.This work was performed with funding from the CHIPS Metrology Program, part of CHIPS for America, National Institute of Standards and Technology, U.S. Department of Commerce.

Access & Use Information

Public: This dataset is intended for public access and use. License: See this page for license information.

Downloads & Resources

Six sets of simulated SEM imageszip file with six subfolders containing SEM image collections
SEM images with varying noise and contrast values

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Six masks for the six simulated SEM image collectionszip file contains mask images and the initial intensity image with max contrast and min noise
image masks defining foreground and background labels

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Three trained AI models (U-net architecture)zip contains three folders with TensorFlow AI models
Three trained AI models on the first five of six simulated SEM image collections

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Tabular files with image and AI model metricszip file contains a folder with image quality metrics and a folder with AI model accuracy
Image quality metrics extracted from six simulated SEM images, as well as...

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relationships between AI model accuracy and...URL
graphs

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source code for detection limits
Python code

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READMETEXT
README.txt

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Landing PageLanding Page

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Dates

Metadata Created Date	September 30, 2025
Metadata Updated Date	September 30, 2025
Data Update Frequency	irregular

Metadata Source

Data.json Data.json Metadata
Download Metadata

Harvested from Commerce Non Spatial Data.json Harvest Source

Additional Metadata

Resource Type	Dataset
Metadata Created Date	September 30, 2025
Metadata Updated Date	September 30, 2025
Publisher	National Institute of Standards and Technology
Maintainer	Peter Bajcsy
Identifier	ark:/88434/mds2-3838
Data First Published	2025-06-12
Language	en
Data Last Modified	2025-05-12 00:00:00
Category	Information Technology:Computational science, Metrology:Dimensional metrology, Nanotechnology:Nanoelectronics, Mathematics and Statistics:Image and signal processing, Mathematics and Statistics:Uncertainty quantification
Public Access Level	public
Data Update Frequency	irregular
Bureau Code	006:55
Metadata Context	https://project-open-data.cio.gov/v1.1/schema/catalog.jsonld
Schema Version	https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby	https://project-open-data.cio.gov/v1.1/schema/catalog.json
Harvest Object Id	8074318e-f85e-4ede-8235-42dcfb25ba79
Harvest Source Id	bce99b55-29c1-47be-b214-b8e71e9180b1
Harvest Source Title	Commerce Non Spatial Data.json Harvest Source
Homepage URL	https://data.nist.gov/od/id/mds2-3838
License	https://www.nist.gov/open/license
Program Code	006:045
Source Datajson Identifier	True
Source Hash	2dcfc812718229e1cae3d2257642b8f374f960d3f2849633bbe400c020c5a34b
Source Schema Version	1.1

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