Detection Limits for SEM Image Segmentation

Metadata Updated: July 9, 2025

The dataset consists of six collections of SEM images, three trained U-net AI models, and CSV files with image quality metrics and trained AI model accuracy metrics. Each SEM image collection contains images augmented with Poisson noise and contrast.This work was performed with funding from the CHIPS Metrology Program, part of CHIPS for America, National Institute of Standards and Technology, U.S. Department of Commerce.

Access & Use Information

Public: This dataset is intended for public access and use. License: See this page for license information.

Downloads & Resources

Six sets of simulated SEM imageszip file with six subfolders containing SEM image collections
SEM images with varying noise and contrast values

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Six masks for the six simulated SEM image collectionszip file contains mask images and the initial intensity image with max contrast and min noise
image masks defining foreground and background labels

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Three trained AI models (U-net architecture)zip contains three folders with TensorFlow AI models
Three trained AI models on the first five of six simulated SEM image collections

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Tabular files with image and AI model metricszip file contains a folder with image quality metrics and a folder with AI model accuracy
Image quality metrics extracted from six simulated SEM images, as well as...

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relationships between AI model accuracy and...URL
graphs

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source code for detection limits
Python code

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READMETEXT
README.txt

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Landing PageLanding Page

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Dates

Metadata Created Date	July 9, 2025
Metadata Updated Date	July 9, 2025
Data Update Frequency	irregular

Metadata Source

Data.json Data.json Metadata
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Harvested from NIST

Additional Metadata

Resource Type	Dataset
Metadata Created Date	July 9, 2025
Metadata Updated Date	July 9, 2025
Publisher	National Institute of Standards and Technology
Maintainer	Peter Bajcsy
Identifier	ark:/88434/mds2-3838
Data First Published	2025-06-12
Language	en
Data Last Modified	2025-05-12 00:00:00
Category	Information Technology:Computational science, Metrology:Dimensional metrology, Nanotechnology:Nanoelectronics, Mathematics and Statistics:Image and signal processing, Mathematics and Statistics:Uncertainty quantification
Public Access Level	public
Data Update Frequency	irregular
Bureau Code	006:55
Metadata Context	https://project-open-data.cio.gov/v1.1/schema/data.json
Schema Version	https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby	https://project-open-data.cio.gov/v1.1/schema/catalog.json
Harvest Object Id	1f22464b-0d42-4460-abfc-0186a0d5ce1c
Harvest Source Id	74e175d9-66b3-4323-ac98-e2a90eeb93c0
Harvest Source Title	NIST
Homepage URL	https://data.nist.gov/od/id/mds2-3838
License	https://www.nist.gov/open/license
Program Code	006:045
Source Datajson Identifier	True
Source Hash	a20f7a04b55903c37b82a1250493c551b51d5eea43da260700fb69daa065f713
Source Schema Version	1.1

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