Data to accompany "Low Electron Beam Energy X-ray Microanalysis: The Adventure Continues!"
EDS spectra measured at E0 = 5 keV for 75 materials are provided along with the standards used for quantification with the NIST DTSA-II software for electron-excited X-ray microanalysis with energy dispersive spectrometry.The data sets are organized according to the analytical instrument platform used, and an EDS detector configuration appropriate to each EDS spectrometer is provided . Each folder contains spectra for that specific material and the standards used as well as an Excel file summarizing the DTSA-II results in terms of the raw mass concentrations, normalized mass concentrations, and atomic concentrations. Each calculated compositional value is accompanied by the uncertainty budget as estimated by DTSA-II.An Excel file (5keV_accuracy_summary_DTSA-II) containing an overall summary of results for all 75 materials is provided.
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Complete Metadata
| @type | dcat:Dataset |
|---|---|
| accessLevel | public |
| bureauCode |
[ "006:55" ] |
| conformsTo | https://www.iso.org/standard/56211.html |
| contactPoint |
{ "fn": "Dale E. Newbury", "hasEmail": "mailto:dale.newbury@nist.gov" } |
| description | EDS spectra measured at E0 = 5 keV for 75 materials are provided along with the standards used for quantification with the NIST DTSA-II software for electron-excited X-ray microanalysis with energy dispersive spectrometry.The data sets are organized according to the analytical instrument platform used, and an EDS detector configuration appropriate to each EDS spectrometer is provided . Each folder contains spectra for that specific material and the standards used as well as an Excel file summarizing the DTSA-II results in terms of the raw mass concentrations, normalized mass concentrations, and atomic concentrations. Each calculated compositional value is accompanied by the uncertainty budget as estimated by DTSA-II.An Excel file (5keV_accuracy_summary_DTSA-II) containing an overall summary of results for all 75 materials is provided. |
| distribution |
[ { "title": "5 keV X-ray spectra", "format": "ZIP file", "mediaType": "application/x-zip-compressed", "description": "A collection of 5 keV electron excited X-ray spectra measured on an energy dispersive X-ray spectrometer with the necessary standards and meta-data.", "downloadURL": "https://data.nist.gov/od/ds/mds2-2853/5keV_Analysis_Spectrum_Archive.zip" } ] |
| identifier | ark:/88434/mds2-2853 |
| issued | 2023-01-11 |
| keyword |
[ "EDS", "SDD", "SEM", "SEM-EDS", "X-ray spectrometry", "energy dispersive X-ray spectrometry", "low beam energy", "low keV", "scanning electron microscopy", "silicon-drift detector" ] |
| language |
[ "en" ] |
| license | https://www.nist.gov/open/license |
| modified | 2022-12-06 00:00:00 |
| programCode |
[ "006:045" ] |
| publisher |
{ "name": "National Institute of Standards and Technology", "@type": "org:Organization" } |
| theme |
[ "Chemistry:Analytical chemistry", "Materials:Ceramics", "Materials:Composites", "Materials:Materials characterization", "Materials:Metals", "Metrology:Amount of substance" ] |
| title | Data to accompany "Low Electron Beam Energy X-ray Microanalysis: The Adventure Continues!" |
