Data for manuscript: Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography
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5 resources available
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Experimental data for figure 4(b)
TEXT/CSV -
Experimental data for Figure 4c
TEXT/CSV -
Fit data for Figure 4c
TEXT/CSV -
Experimental data for figure 4d, 10 micrometer disk.
TEXT/CSV -
Experimental data for Figure 4d, 5 micrometer disk
TEXT/CSV
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Complete Metadata
| @type | dcat:Dataset |
|---|---|
| accessLevel | public |
| bureauCode |
[ "006:55" ] |
| contactPoint |
{ "fn": "Vladimir Aksyuk", "hasEmail": "mailto:vladimir.aksyuk@nist.gov" } |
| description | Data from figure 4 "Measuring photonic optomechanical devices" in manuscript "Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography," in Journal of Microelectromechanical Systems, doi: 10.1109/JMEMS.2023.3247300. |
| distribution |
[ { "title": "Experimental data for figure 4(b)", "mediaType": "text/csv", "description": "Broad wavelength scan for transverse magnetic (TM) polarized modes of a typical disk-cantilever device (w = 150 nm, G = 180 nm )", "downloadURL": "https://data.nist.gov/od/ds/mds2-2815/Fig4b_experimental_data.csv" }, { "title": "Experimental data for Figure 4c", "mediaType": "text/csv", "description": "High-Q optical resonance indicated with an red arrow in (b)", "downloadURL": "https://data.nist.gov/od/ds/mds2-2815/Fig4c_experimental_data.csv" }, { "title": "Fit data for Figure 4c", "mediaType": "text/csv", "description": "Lorentzian fit Q=64000", "downloadURL": "https://data.nist.gov/od/ds/mds2-2815/Fig4c_fit_data.csv" }, { "title": "Experimental data for figure 4d, 10 micrometer disk.", "mediaType": "text/csv", "description": "Transducer non-contact noise spectral density S_d for two devices with different dimensions. Device with a 10 micrometer disk (upper, red) presents a lowest in-plane mode eigenfrequency of ?_0/2? ? 5 MHz and damping coefficient ?/2? ? 0.34 MHz while the 5 micrometer disk device (lower, blue) presents ?_0/2? ? 25 MHz and damping coefficient ?/2? ? 0.28 MHz.", "downloadURL": "https://data.nist.gov/od/ds/mds2-2815/Fig4d_experimental_data_10um.csv" }, { "title": "Experimental data for Figure 4d, 5 micrometer disk", "mediaType": "text/csv", "description": "Transducer non-contact noise spectral density S_d for two devices with different dimensions. Device with a 10 micrometer disk (upper, red) presents a lowest in-plane mode eigenfrequency of ?_0/2? ? 5 MHz and damping coefficient ?/2? ? 0.34 MHz while the 5 micrometer disk device (lower, blue) presents ?_0/2? ? 25 MHz and damping coefficient ?/2? ? 0.28 MHz.", "downloadURL": "https://data.nist.gov/od/ds/mds2-2815/Fig4d_experimental_data_5um.csv" } ] |
| identifier | ark:/88434/mds2-2815 |
| issued | 2022-10-14 |
| keyword |
[ "cavity optomechanical sensors", "integrated photonics" ] |
| landingPage | https://data.nist.gov/od/id/mds2-2815 |
| language |
[ "en" ] |
| license | https://www.nist.gov/open/license |
| modified | 2022-10-10 00:00:00 |
| programCode |
[ "006:045" ] |
| publisher |
{ "name": "National Institute of Standards and Technology", "@type": "org:Organization" } |
| theme |
[ "Nanotechnology:Nanofabrication/manufacturing", "Nanotechnology:Nanomechanics", "Nanotechnology:Nanophotonics" ] |
| title | Data for manuscript: Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography |
