Data for manuscript: Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography

Metadata Updated: May 9, 2023

Data from figure 4 "Measuring photonic optomechanical devices" in manuscript "Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography," in Journal of Microelectromechanical Systems, doi: 10.1109/JMEMS.2023.3247300.

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Public: This dataset is intended for public access and use. License: See this page for license information.

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Experimental data for figure 4(b)CSV
Broad wavelength scan for transverse magnetic (TM) polarized modes of a...
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Experimental data for Figure 4cCSV
High-Q optical resonance indicated with an red arrow in (b)
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Fit data for Figure 4cCSV
Lorentzian fit Q=64000
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Experimental data for figure 4d, 10 micrometer disk.CSV
Transducer non-contact noise spectral density S_d for two devices with...
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Experimental data for Figure 4d, 5 micrometer diskCSV
Transducer non-contact noise spectral density S_d for two devices with...
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Dates

Metadata Created Date	October 27, 2022
Metadata Updated Date	May 9, 2023

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Data.json Data.json Metadata
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Harvested from NIST

Additional Metadata

Resource Type	Dataset
Metadata Created Date	October 27, 2022
Metadata Updated Date	May 9, 2023
Publisher	National Institute of Standards and Technology
Maintainer	Vladimir Aksyuk
Identifier	ark:/88434/mds2-2815
Data First Published	2022-10-14
Language	en
Data Last Modified	2022-10-10 00:00:00
Category	Nanotechnology:Nanofabrication/manufacturing, Nanotechnology:Nanomechanics, Nanotechnology:Nanophotonics
Public Access Level	public
Bureau Code	006:55
Metadata Context	https://project-open-data.cio.gov/v1.1/schema/data.json
Schema Version	https://project-open-data.cio.gov/v1.1/schema
Catalog Describedby	https://project-open-data.cio.gov/v1.1/schema/catalog.json
Harvest Object Id	003654db-f97c-41fd-9483-106287f03d47
Harvest Source Id	74e175d9-66b3-4323-ac98-e2a90eeb93c0
Harvest Source Title	NIST
Homepage URL	https://data.nist.gov/od/id/mds2-2815
License	https://www.nist.gov/open/license
Program Code	006:045
Source Datajson Identifier	True
Source Hash	9f373aa7583bfb3676127b837488475aef007bb9
Source Schema Version	1.1

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