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Data for A Switchable Longitudinal & Shear BLS Microscope for Comprehensive Modulus Imaging of Semiconductor Packaging Materials

Published by National Institute of Standards and Technology | National Institute of Standards and Technology | Catalog Last Checked: September 10, 2026 at 05:53 PM | Dataset Last Updated: April 03, 2026
This dataset contains Brillouin light scattering (BLS) measurements collected using a custom-built switchable microscope and spectrometer platform. The microscope has two configurations: 1) a backscattered mode for high resolution longitudinal BLS measurements, and 2) an off-axis mode for longitudinal and shear measurements. The microscope can be used for comprehensive modulus imaging, including longitudinal modulus, Young's modulus, shear modulus, bulk modulus, and Poisson's ratio. In this dataset, the platform is used to characterize two proof-of-concept heterogeneous samples with relevance to semiconductor packaging materials: 1) a bisphenol F diglycidyl ether/diethyl toluene diamine (DEGBF/DETDA)-based polymer (TM-1) with two different degrees of cure, and 2) a bisphenol A diglycidyl ether (DGEBA)-based polymer with silica filler particles present. The modulus values collected using BLS can be compared to results from conventional modulus characterization techniques, including nanoindentation and dynamic mechanical analysis.

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