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    • Data associated with manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement"

    Metadata Updated: September 11, 2024

    This repository contains all of the data used in the manuscript "Linearizing the vertical scale of an interferometric microscope and its effect on step-height measurement," by Thomas A. Germer, T. Brian Renegar, Ulf Griesmann, and Johannes A. Soons, which has been published in Surface Topography: Metrology and Properties volume 12, number 2, article 025012 on 8 May 2024. The repository also contains a Python Jupyter notebook that performs the analysis of the data and generates the figures in the manuscript.

    Access & Use Information

    Public: This dataset is intended for public access and use. License: See this page for license information.

    Downloads & Resources

    References

    https://dx.doi.org/10.1088/2051-672X/ad44bb

    Dates

    Metadata Created Date March 12, 2024
    Metadata Updated Date September 11, 2024

    Metadata Source

    Harvested from NIST

    Other Data Resources

    Additional Metadata

    Resource Type Dataset
    Metadata Created Date March 12, 2024
    Metadata Updated Date September 11, 2024
    Publisher National Institute of Standards and Technology
    Maintainer
    Identifier ark:/88434/mds2-3116
    Data First Published 2024-02-09
    Language en
    Data Last Modified 2023-11-24 00:00:00
    Category Metrology:Dimensional metrology
    Public Access Level public
    Bureau Code 006:55
    Metadata Context https://project-open-data.cio.gov/v1.1/schema/data.json
    Schema Version https://project-open-data.cio.gov/v1.1/schema
    Catalog Describedby https://project-open-data.cio.gov/v1.1/schema/catalog.json
    Harvest Object Id 988f50fd-a95a-4529-b5be-0a76c35bd201
    Harvest Source Id 74e175d9-66b3-4323-ac98-e2a90eeb93c0
    Harvest Source Title NIST
    Homepage URL https://data.nist.gov/od/id/mds2-3116
    License https://www.nist.gov/open/license
    Program Code 006:045
    Related Documents https://dx.doi.org/10.1088/2051-672X/ad44bb
    Source Datajson Identifier True
    Source Hash a431c3e431ea2aaa4cc595aaf8b2ede27c2f9f844a665d1be528c9eac0c7e310
    Source Schema Version 1.1

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