Data and scripts associated with "Quantification of STEM-in-SEM Energy Dispersive X-ray Spectra using Bulk Standards"
Spectra measured from SRM-2063a and standards at 20 keV, 25 keV and 30 keV. Scripts for processing this data. Scripts for Monte Carlo simulating thin films of ADM-6005a and Al2O3 on CaF2 and for quantifying these simulated spectra.
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Complete Metadata
| @type | dcat:Dataset |
|---|---|
| accessLevel | public |
| accrualPeriodicity | irregular |
| bureauCode |
[ "006:55" ] |
| contactPoint |
{ "fn": "Nicholas Ritchie", "hasEmail": "mailto:nicholas.ritchie@nist.gov" } |
| description | Spectra measured from SRM-2063a and standards at 20 keV, 25 keV and 30 keV. Scripts for processing this data. Scripts for Monte Carlo simulating thin films of ADM-6005a and Al2O3 on CaF2 and for quantifying these simulated spectra. |
| distribution |
[ { "title": "READ_ME", "format": "Text", "mediaType": "text/plain", "description": "The read_me file associated with this data set.", "downloadURL": "https://data.nist.gov/od/ds/mds2-2975/2975_README.txt" }, { "title": "STEM-in-SEM dataset", "format": "ZIP Archive File", "mediaType": "application/zip", "description": "X-ray spectra and scripts in a zip file", "downloadURL": "https://data.nist.gov/od/ds/mds2-2975/STEMinSEM.zip" } ] |
| identifier | ark:/88434/mds2-2975 |
| issued | 2023-05-19 |
| keyword |
[ "NIST DTSA-II software", "Quantitative electron-excited X-ray microanalysis", "STEM-in-SEM", "bulk standards", "energy-dispersive spectrometry (EDS)", "thickness", "thin films" ] |
| landingPage | https://data.nist.gov/od/id/mds2-2975 |
| language |
[ "en" ] |
| license | https://www.nist.gov/open/license |
| modified | 2023-04-04 00:00:00 |
| programCode |
[ "006:045" ] |
| publisher |
{ "name": "National Institute of Standards and Technology", "@type": "org:Organization" } |
| theme |
[ "Materials:Ceramics", "Materials:Composites", "Materials:Materials characterization", "Materials:Metals", "Materials:Superconductors" ] |
| title | Data and scripts associated with "Quantification of STEM-in-SEM Energy Dispersive X-ray Spectra using Bulk Standards" |
