{
  "@type": "dcat:Dataset",
  "accessLevel": "public",
  "bureauCode": [
    "006:55"
  ],
  "contactPoint": {
    "fn": "Regis Kline",
    "hasEmail": "mailto:r.kline@nist.gov"
  },
  "description": "Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry",
  "distribution": [
    {
      "accessURL": "https://doi.org/10.18434/T4/1503330",
      "description": "DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial",
      "format": "text/html",
      "title": "DOI Access to X-ray Metrology for the Semiconductor Industry Tutorial"
    }
  ],
  "identifier": "7CE906EBFAD7231EE0532457068153892009",
  "keyword": [
    "Semiconductor metrology",
    "dimensional metrology",
    "small angle x-ray scattering"
  ],
  "landingPage": "https://www.nist.gov/mml/materials-science-and-engineering-division/polymers-processing-group/x-ray-metrology",
  "language": [
    "en"
  ],
  "license": "https://www.nist.gov/open/license",
  "modified": "2018-12-01",
  "programCode": [
    "006:045"
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  "publisher": {
    "@type": "org:Organization",
    "name": "National Institute of Standards and Technology"
  },
  "theme": [
    "Electronics:Semiconductors",
    "Metrology:Dimensional metrology",
    "Nanotechnology:Nanoelectronics",
    "Nanotechnology:Nanometrology"
  ],
  "title": "X-ray Metrology for the Semiconductor Industry Tutorial"
}