{"@type": "dcat:Dataset", "accessLevel": "public", "accrualPeriodicity": "irregular", "bureauCode": ["006:55"], "contactPoint": {"fn": "Mark Alexander Henn", "hasEmail": "mailto:mark.henn@nist.gov"}, "describedBy": "https://mahenn.shinyapps.io/MoR1/", "description": "This data set consists of several files that were created to accompany M.o.R., a shiny app created by the Surface & Nanostructure Metrology Group in the Engineering Physics Division of the Physical Measurement Laboratory (PML) at the National Institute of Standards and Technology. It was created to simplify model-based metrology. A detailed explanation of the proper usage can be found in the M.o.R. documentation.", "distribution": [{"accessURL": "https://doi.org/10.18434/T4/1426859", "description": "DOI Access for 'An example data set to demonstrate teh usage of M.o.R., a shiny app for model-based metrology'", "format": "text/html", "title": "DOI Access for 'An example data set to demonstrate teh usage of M.o.R., a shiny app for model-based metrology'"}, {"downloadURL": "https://s3.amazonaws.com/nist-midas/1886/Mu.csv", "mediaType": "text/plain"}, {"downloadURL": "https://s3.amazonaws.com/nist-midas/1886/Mu.csv.sha256", "mediaType": "text/plain"}, {"downloadURL": "https://s3.amazonaws.com/nist-midas/1886/Phi.csv", "mediaType": "text/plain"}, {"downloadURL": "https://s3.amazonaws.com/nist-midas/1886/Phi.csv.sha256", "mediaType": "text/plain"}, {"downloadURL": "https://s3.amazonaws.com/nist-midas/1886/Pi.csv", "mediaType": "text/plain"}, {"downloadURL": "https://s3.amazonaws.com/nist-midas/1886/Pi.csv.sha256", "mediaType": "text/plain"}, {"downloadURL": "https://s3.amazonaws.com/nist-midas/1886/Sigma.csv", "mediaType": "text/plain"}, {"downloadURL": "https://s3.amazonaws.com/nist-midas/1886/Sigma.csv.sha256", "mediaType": "text/plain"}, {"downloadURL": "https://s3.amazonaws.com/nist-midas/1886/y.csv", "mediaType": "text/plain"}, {"downloadURL": "https://s3.amazonaws.com/nist-midas/1886/y.csv.sha256", "mediaType": "text/plain"}], "identifier": "6376FC675D0E1D77E0531A5706812BC21886", "keyword": ["model-based metrology", "statistics"], "landingPage": "https://data.nist.gov/od/id/6376FC675D0E1D77E0531A5706812BC21886", "language": ["en"], "license": "https://www.nist.gov/open/license", "modified": "2018-01-23", "programCode": ["006:045"], "publisher": {"@type": "org:Organization", "name": "National Institute of Standards and Technology"}, "theme": ["Mathematics and Statistics: Numerical methods and software", "Mathematics and Statistics: Statistical analysis"], "title": "An example data set to demonstrate the usage of M.o.R., a shiny app for model-based metrology."}