{
  "@type": "dcat:Dataset",
  "accessLevel": "public",
  "accrualPeriodicity": "irregular",
  "bureauCode": [
    "006:55"
  ],
  "contactPoint": {
    "fn": "Andrew Herzing",
    "hasEmail": "mailto:andrew.herzing@nist.gov"
  },
  "description": "Energy dispersive X-ray spectroscopy (EDX) tomographic tilt series of a needle-shaped sample extracted from NIST SRM 2135c.\n\nSample description: This SRM consists of alternating layers of nickel and chromium on a silicon substrate (see SRM certificate for further detail).\n\nData description.  The scan size for each spectrum image (SI) is 128 pixels x 100 pixels and 4000 spectral channels deep. EDX data were collected using the following parameters:\n\nBeam energy (keV): 300.0\nProbe current: 0.5 nA\nPixel size: 3.0 nm\nDwell time per pixel: 200 msec\nEnergy resolution: 10 eV/channel\n\nThe SI's were collected over a 180 degree range of specimen tilts with a 5 degree tilt step between each acquisition.",
  "distribution": [
    {
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3631/3631_README.txt",
      "mediaType": "text/plain",
      "title": "3631_README"
    },
    {
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3631/NIST_SRM_2135c_EDX_Tomography.zip",
      "mediaType": "text/plain",
      "title": "NIST_SRM_2135c_EDX_Tomography"
    }
  ],
  "identifier": "ark:/88434/mds2-3631",
  "keyword": [
    "3-D imaging",
    "EDX",
    "STEM",
    "electron microscopy",
    "electron tomography"
  ],
  "landingPage": "https://data.nist.gov/od/id/mds2-3631",
  "language": [
    "en"
  ],
  "license": "https://www.nist.gov/open/license",
  "modified": "2024-11-05 00:00:00",
  "programCode": [
    "006:045"
  ],
  "publisher": {
    "@type": "org:Organization",
    "name": "National Institute of Standards and Technology"
  },
  "theme": [
    "Materials:Materials characterization",
    "Nanotechnology",
    "Nanotechnology:Nanomaterials",
    "Nanotechnology:Nanometrology",
    "Standards:Reference materials"
  ],
  "title": "NIST SRM 2135c Hyperspectral Tomography Tilt Series"
}