{"@type": "dcat:Dataset", "accessLevel": "public", "accrualPeriodicity": "irregular", "bureauCode": ["006:55"], "contactPoint": {"fn": "Andrew Herzing", "hasEmail": "mailto:andrew.herzing@nist.gov"}, "description": "Energy dispersive X-ray spectroscopy (EDX) tomographic tilt series of a needle-shaped sample extracted from NIST SRM 2135c.Sample description: This SRM consists of alternating layers of nickel and chromium on a silicon substrate (see SRM certificate for further detail).Data description.  The scan size for each spectrum image (SI) is 128 pixels x 100 pixels and 4000 spectral channels deep. EDX data were collected using the following parameters:Beam energy (keV): 300.0Probe current: 0.5 nAPixel size: 3.0 nmDwell time per pixel: 200 msecEnergy resolution: 10 eV/channelThe SI's were collected over a 180 degree range of specimen tilts with a 5 degree tilt step between each acquisition.", "distribution": [{"downloadURL": "https://data.nist.gov/od/ds/mds2-3631/3631_README.txt", "mediaType": "text/plain", "title": "3631_README"}, {"downloadURL": "https://data.nist.gov/od/ds/mds2-3631/NIST_SRM_2135c_EDX_Tomography.zip", "mediaType": "text/plain", "title": "NIST_SRM_2135c_EDX_Tomography"}], "identifier": "ark:/88434/mds2-3631", "keyword": ["3-D imaging", "EDX", "STEM", "electron microscopy", "electron tomography"], "landingPage": "https://data.nist.gov/od/id/mds2-3631", "language": ["en"], "license": "https://www.nist.gov/open/license", "modified": "2024-11-05 00:00:00", "programCode": ["006:045"], "publisher": {"@type": "org:Organization", "name": "National Institute of Standards and Technology"}, "theme": ["Materials:Materials characterization", "Nanotechnology", "Nanotechnology:Nanomaterials", "Nanotechnology:Nanometrology", "Standards:Reference materials"], "title": "NIST SRM 2135c Hyperspectral Tomography Tilt Series"}