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"landingPage": "https://data.nist.gov/od/id/mds2-3725", "language": ["en"], "license": "https://www.nist.gov/open/license", "modified": "2025-02-27 00:00:00", "programCode": ["006:045"], "publisher": {"@type": "org:Organization", "name": "National Institute of Standards and Technology"}, "theme": ["Materials:Polymers", "Metrology:Optical, photometry, and laser metrology", "Physics:Spectroscopy"], "title": "Data for A Dual Mode Brillouin/Low-Frequency Raman Spectroscopy Microscope for Local Mechanical Property Imaging for Semiconductor Packaging Materials"}