{"@type": "dcat:Dataset", "accessLevel": "public", "accrualPeriodicity": "irregular", "bureauCode": ["006:55"], "contactPoint": {"fn": "Ann Debay", "hasEmail": "mailto:chiaramonti@nist.gov"}, "description": "Atom probe tomography is an emergent materials characterization technique with the potential to impact many advanced technology applications. NIST is supporting efforts to develop  a robust understanding of the atom probe instrument performance and to advance standards that meet the needs and concerns of relevant stakeholders. \nData Type Description: *.csv.", "distribution": [{"downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-4005/4005_README.txt", "mediaType": "text/plain"}, {"downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-4005/4005_README.txt.sha256", "mediaType": "text/plain"}, {"downloadURL": "https://data.nist.gov/od/ds/mds2-4005/EUV_005T_10DR_25kHz.csv", "mediaType": "text/csv", "title": "EUV_005T_10DR_25kHz"}, {"downloadURL": "https://data.nist.gov/od/ds/mds2-4005/EUV_005T_1DR_25kHz.csv", "mediaType": "text/csv", "title": "EUV_005T_1DR_25kHz"}, {"downloadURL": "https://data.nist.gov/od/ds/mds2-4005/EUV_5T_10DR_25kHz.csv", "mediaType": "text/csv", "title": "EUV_5T_10DR_25kHz"}, {"downloadURL": "https://data.nist.gov/od/ds/mds2-4005/EUV_5T_1DR_25kHz.csv", "mediaType": "text/csv", "title": "EUV_5T_1DR_25kHz"}, {"downloadURL": "https://data.nist.gov/od/ds/mds2-4005/NUV_01pJ_10DR_250kHz.csv", "mediaType": "text/csv", "title": "NUV_01pJ_10DR_250kHz"}, {"downloadURL": "https://data.nist.gov/od/ds/mds2-4005/NUV_01pJ_1DR_250kHz.csv", "mediaType": "text/csv", "title": "NUV_01pJ_1DR_250kHz"}, {"downloadURL": "https://data.nist.gov/od/ds/mds2-4005/NUV_01pJ_1DR_25kHz.csv", "mediaType": "text/csv", "title": "NUV_01pJ_1DR_25kHz"}, {"downloadURL": "https://data.nist.gov/od/ds/mds2-4005/NUV_100pJ_10DR_250kHz.csv", "mediaType": "text/csv", "title": "NUV_100pJ_10DR_250kHz"}, {"downloadURL": "https://data.nist.gov/od/ds/mds2-4005/NUV_100pJ_1DR_250kHz.csv", "mediaType": "text/csv", "title": "NUV_100pJ_1DR_250kHz"}, {"downloadURL": "https://data.nist.gov/od/ds/mds2-4005/NUV_100pJ_1DR_25kHz.csv", "mediaType": "text/csv", "title": "NUV_100pJ_1DR_25kHz"}], "identifier": "ark:/88434/mds2-4005", "issued": "2026-01-16", "keyword": ["Advanced Materials", "atom probe", "field evaporation", "mass spectrometry"], "landingPage": "https://data.nist.gov/od/id/mds2-4005", "language": ["en"], "license": "https://www.nist.gov/open/license", "modified": "2025-09-26 00:00:00", "programCode": ["006:045"], "publisher": {"@type": "org:Organization", "name": "National Institute of Standards and Technology"}, "theme": ["Materials:Materials characterization", "Metrology:Amount of substance"], "title": "Atom probe tomography mass spectra of MgO using extreme ultraviolet and near ultraviolet laser pulsing."}