{"@type": "dcat:Dataset", "accessLevel": "public", "accrualPeriodicity": "irregular", "bureauCode": ["006:55"], "contactPoint": {"@type": "vcard:Contact", "fn": "Justin Gorham", "hasEmail": "mailto:justin.gorham@nist.gov"}, "description": "The NIST Electron Effective Attenuation Length Database provides values of electron effective attenuation lengths (EALs) in materials at user-selected electron energies between 50 eV and 2,000 eV. The database was designed mainly to provide EALs (to account for effects of elastic-electron scattering) for measurements of the thicknesses of overlayer films and, to a much lesser extent, for measurements of the depths of thin marker layers. EALs are calculated using an algorithm based on electron transport theory for measurement conditions specified by the user. A critical review on the EAL has been published [A. Jablonski and C. J. Powell, Surf. Science Reports 47, 33 (2002)], and simple practical expressions for the EAL, mean escape depth, and information depth are given in another paper by the same authors [J. Vac. Sci. Technol. A 27, 253 (2009)].", "distribution": [{"accessURL": "https://dx.doi.org/10.18434/T4MK5P", "description": "DOI Access to NIST Electron Effective-Attenuation-Length Database - SRD 82", "format": "text/html", "mediaType": "text/html", "title": "DOI Access to NIST Electron Effective-Attenuation-Length Database - SRD 82"}, {"accessURL": "https://www-s.nist.gov/srd_online/index.cfm?fuseaction=home.main&productID=SRD82v1.3", "description": "This database is free, but requires that a form be filled out in order to be able to download.", "title": "Form to download the database"}], "identifier": "ECBCC1C130092ED9E04306570681B10715", "keyword": ["Auger electron spectroscopy", "ESCA", "XPS", "depth distribution function", "effective attenuation length", "electron spectroscopy for chemical analysis", "material database", "photoelectron", "photoelectron spectroscopy", "photoemission", "surface analysis", "x-ray photoelectron spectroscopy"], "landingPage": "https://www.nist.gov/srd/nist-standard-reference-database-82", "language": ["en"], "license": "https://www.nist.gov/open/license", "modified": "2011-01-01 00:00:00", "programCode": ["006:052"], "publisher": {"@type": "org:Organization", "name": "National Institute of Standards and Technology"}, "references": ["https://dx.doi.org/10.1116/1.3071947", "https://www.nist.gov/system/files/documents/srd/SRD82UsersGuideV1-3.pdf"], "theme": ["Standards:Reference data"], "title": "NIST Electron Effective-Attenuation-Length Database - SRD 82"}