{"@type": "dcat:Dataset", "accessLevel": "public", "bureauCode": ["006:55"], "contactPoint": {"fn": "Vladimir Aksyuk", "hasEmail": "mailto:vladimir.aksyuk@nist.gov"}, "description": "Data from figure 4 \"Measuring photonic optomechanical devices\" in manuscript \"Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography,\"\u00a0in\u00a0Journal of Microelectromechanical Systems, doi: 10.1109/JMEMS.2023.3247300.", "distribution": [{"description": "Broad wavelength scan for transverse magnetic (TM) polarized modes of a typical disk-cantilever device (w = 150 nm, G = 180 nm )", "downloadURL": "https://data.nist.gov/od/ds/mds2-2815/Fig4b_experimental_data.csv", "mediaType": "text/csv", "title": "Experimental data for figure 4(b)"}, {"description": "High-Q optical resonance indicated with an red arrow in (b)", "downloadURL": "https://data.nist.gov/od/ds/mds2-2815/Fig4c_experimental_data.csv", "mediaType": "text/csv", "title": "Experimental data for Figure 4c"}, {"description": "Lorentzian fit Q=64000", "downloadURL": "https://data.nist.gov/od/ds/mds2-2815/Fig4c_fit_data.csv", "mediaType": "text/csv", "title": "Fit data for Figure 4c"}, {"description": "Transducer non-contact noise spectral density S_d for two devices with different dimensions. Device with a 10 micrometer disk (upper, red)  presents a lowest in-plane mode eigenfrequency of ?_0/2? ? 5 MHz and damping coefficient ?/2? ? 0.34 MHz while the 5 micrometer disk device (lower, blue) presents ?_0/2? ? 25 MHz and damping coefficient ?/2? ? 0.28 MHz.", "downloadURL": "https://data.nist.gov/od/ds/mds2-2815/Fig4d_experimental_data_10um.csv", "mediaType": "text/csv", "title": "Experimental data for figure 4d, 10 micrometer disk."}, {"description": "Transducer non-contact noise spectral density S_d for two devices with different dimensions. Device with a 10 micrometer disk (upper, red)  presents a lowest in-plane mode eigenfrequency of ?_0/2? ? 5 MHz and damping coefficient ?/2? ? 0.34 MHz while the 5 micrometer disk device (lower, blue) presents ?_0/2? ? 25 MHz and damping coefficient ?/2? ? 0.28 MHz.", "downloadURL": "https://data.nist.gov/od/ds/mds2-2815/Fig4d_experimental_data_5um.csv", "mediaType": "text/csv", "title": "Experimental data for Figure 4d, 5 micrometer disk"}], "identifier": "ark:/88434/mds2-2815", "issued": "2022-10-14", "keyword": ["cavity optomechanical sensors", "integrated photonics"], "landingPage": "https://data.nist.gov/od/id/mds2-2815", "language": ["en"], "license": "https://www.nist.gov/open/license", "modified": "2022-10-10 00:00:00", "programCode": ["006:045"], "publisher": {"@type": "org:Organization", "name": "National Institute of Standards and Technology"}, "theme": ["Nanotechnology:Nanofabrication/manufacturing", "Nanotechnology:Nanomechanics", "Nanotechnology:Nanophotonics"], "title": "Data for manuscript: Integrated photonic optomechanical atomic force microscopy  probes batch fabricated using deep UV photolithography"}