{
  "@type": "dcat:Dataset",
  "accessLevel": "public",
  "bureauCode": [
    "006:55"
  ],
  "conformsTo": "https://www.iso.org/standard/56211.html",
  "contactPoint": {
    "fn": "Dale E. Newbury",
    "hasEmail": "mailto:dale.newbury@nist.gov"
  },
  "description": "EDS spectra measured at E0 = 5 keV for 75 materials are provided along with the standards used for quantification with the NIST DTSA-II software for electron-excited X-ray microanalysis with energy dispersive spectrometry.\n\nThe data sets are organized according to the analytical instrument platform used, and an EDS detector configuration appropriate to each EDS spectrometer is provided . Each folder contains spectra for that specific material and the standards used as well as an Excel file summarizing the DTSA-II results in terms of the raw mass concentrations, normalized mass concentrations, and atomic concentrations. Each calculated compositional value is accompanied by the uncertainty budget as estimated by DTSA-II.\n\nAn Excel file (5keV_accuracy_summary_DTSA-II) containing an overall summary of results for all 75 materials is provided.",
  "distribution": [
    {
      "description": "A collection of 5 keV electron excited X-ray spectra measured on an energy dispersive X-ray spectrometer with the necessary standards and meta-data.",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-2853/5keV_Analysis_Spectrum_Archive.zip",
      "format": "ZIP file",
      "mediaType": "application/x-zip-compressed",
      "title": "5 keV X-ray spectra"
    }
  ],
  "identifier": "ark:/88434/mds2-2853",
  "issued": "2023-01-11",
  "keyword": [
    "EDS",
    "SDD",
    "SEM",
    "SEM-EDS",
    "X-ray spectrometry",
    "energy dispersive X-ray spectrometry",
    "low beam energy",
    "low keV",
    "scanning electron microscopy",
    "silicon-drift detector"
  ],
  "language": [
    "en"
  ],
  "license": "https://www.nist.gov/open/license",
  "modified": "2022-12-06 00:00:00",
  "programCode": [
    "006:045"
  ],
  "publisher": {
    "@type": "org:Organization",
    "name": "National Institute of Standards and Technology"
  },
  "theme": [
    "Chemistry:Analytical chemistry",
    "Materials:Ceramics",
    "Materials:Composites",
    "Materials:Materials characterization",
    "Materials:Metals",
    "Metrology:Amount of substance"
  ],
  "title": "Data to accompany \"Low Electron Beam Energy X-ray Microanalysis: The Adventure Continues!\""
}